<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-05288077</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-13T05:07:53+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Deep Learning-Driven Automation of Inner and Outer Objects Segmentation in SEM/TEM Imaging for High-Throughput Semiconductor Metrology</title>
            <author role="aut">
              <persName>
                <forename type="first">Isaac Wilfried</forename>
                <surname>Sanou</surname>
              </persName>
              <idno type="halauthorid">2399486-0</idno>
              <affiliation ref="#struct-1147909"/>
              <affiliation ref="#struct-1063677"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Julien</forename>
                <surname>Baderot</surname>
              </persName>
              <idno type="idhal" notation="numeric">1321579</idno>
              <idno type="halauthorid" notation="string">2226865-1321579</idno>
              <idno type="IDREF">https://www.idref.fr/255917244</idno>
              <idno type="VIAF">https://viaf.org/viaf/119162606679449532788</idno>
              <idno type="ORCID">https://orcid.org/0009-0001-3842-9852</idno>
              <affiliation ref="#struct-1147909"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Ali</forename>
                <surname>Hallal</surname>
              </persName>
              <idno type="idhal" notation="numeric">775360</idno>
              <idno type="halauthorid" notation="string">957166-775360</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-2284-9027</idno>
              <affiliation ref="#struct-1043270"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Vincent</forename>
                <surname>Barra</surname>
              </persName>
              <email type="md5">c6b3e705270a07b18c8dd4176ebfc9ce</email>
              <email type="domain">uca.fr</email>
              <idno type="idhal" notation="string">vincent-barra</idno>
              <idno type="idhal" notation="numeric">171668</idno>
              <idno type="halauthorid" notation="string">28761-171668</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-8975-222X</idno>
              <idno type="IDREF">https://www.idref.fr/150156243</idno>
              <affiliation ref="#struct-490706"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Léo</forename>
                <surname>Mazauric</surname>
              </persName>
              <idno type="halauthorid">3556019-0</idno>
              <affiliation ref="#struct-1147909"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Johann</forename>
                <surname>Foucher</surname>
              </persName>
              <idno type="halauthorid">354894-0</idno>
              <affiliation ref="#struct-1147909"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Vincent</forename>
                <surname>BARRA</surname>
              </persName>
              <email type="md5">c6b3e705270a07b18c8dd4176ebfc9ce</email>
              <email type="domain">uca.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2025-09-29 09:52:54</date>
              <date type="whenModified">2025-10-29 10:06:03</date>
              <date type="whenReleased">2025-09-29 09:52:54</date>
              <date type="whenProduced">2025-10-09</date>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="332078">
                <persName>
                  <forename>Vincent</forename>
                  <surname>BARRA</surname>
                </persName>
                <email type="md5">c6b3e705270a07b18c8dd4176ebfc9ce</email>
                <email type="domain">uca.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-05288077</idno>
            <idno type="halUri">https://hal.science/hal-05288077</idno>
            <idno type="halBibtex">sanou:hal-05288077</idno>
            <idno type="halRefHtml">&lt;i&gt;Journal of Micro/Nanopatterning, Materials, and Metrology&lt;/i&gt;, 2025, 24 (4), pp.041406. &lt;a target="_blank" href="https://dx.doi.org/10.1117/1.JMM.24.4.041406"&gt;&amp;#x27E8;10.1117/1.JMM.24.4.041406&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Journal of Micro/Nanopatterning, Materials, and Metrology, 2025, 24 (4), pp.041406. &amp;#x27E8;10.1117/1.JMM.24.4.041406&amp;#x27E9;</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="CEA">CEA - Commissariat à l'énergie atomique</idno>
            <idno type="stamp" n="UGA">HAL Grenoble Alpes</idno>
            <idno type="stamp" n="PRES_CLERMONT">Université de Clermont</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="INPG">Institut polytechnique de Grenoble</idno>
            <idno type="stamp" n="LIMOS" corresp="PRES_CLERMONT">Laboratoire d'Informatique, de Modélisation et d'optimisation des Systèmes</idno>
            <idno type="stamp" n="IRIG" corresp="CEA">Institut de Recherche Interdisciplinaire de Grenoble</idno>
            <idno type="stamp" n="CEA-GRE" corresp="CEA">CEA Grenoble</idno>
            <idno type="stamp" n="UGA-EPE">Université Grenoble Alpes [2020-*]</idno>
            <idno type="stamp" n="CLERMONT-AUVERGNE-INP">Clermont Auvergne INP</idno>
            <idno type="stamp" n="TEST-UGA">TEST-UGA</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Deep Learning-Driven Automation of Inner and Outer Objects Segmentation in SEM/TEM Imaging for High-Throughput Semiconductor Metrology</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Isaac Wilfried</forename>
                    <surname>Sanou</surname>
                  </persName>
                  <idno type="halauthorid">2399486-0</idno>
                  <affiliation ref="#struct-1147909"/>
                  <affiliation ref="#struct-1063677"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Julien</forename>
                    <surname>Baderot</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">1321579</idno>
                  <idno type="halauthorid" notation="string">2226865-1321579</idno>
                  <idno type="IDREF">https://www.idref.fr/255917244</idno>
                  <idno type="VIAF">https://viaf.org/viaf/119162606679449532788</idno>
                  <idno type="ORCID">https://orcid.org/0009-0001-3842-9852</idno>
                  <affiliation ref="#struct-1147909"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Ali</forename>
                    <surname>Hallal</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">775360</idno>
                  <idno type="halauthorid" notation="string">957166-775360</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-2284-9027</idno>
                  <affiliation ref="#struct-1043270"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Vincent</forename>
                    <surname>Barra</surname>
                  </persName>
                  <email type="md5">c6b3e705270a07b18c8dd4176ebfc9ce</email>
                  <email type="domain">uca.fr</email>
                  <idno type="idhal" notation="string">vincent-barra</idno>
                  <idno type="idhal" notation="numeric">171668</idno>
                  <idno type="halauthorid" notation="string">28761-171668</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-8975-222X</idno>
                  <idno type="IDREF">https://www.idref.fr/150156243</idno>
                  <affiliation ref="#struct-490706"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Léo</forename>
                    <surname>Mazauric</surname>
                  </persName>
                  <idno type="halauthorid">3556019-0</idno>
                  <affiliation ref="#struct-1147909"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Johann</forename>
                    <surname>Foucher</surname>
                  </persName>
                  <idno type="halauthorid">354894-0</idno>
                  <affiliation ref="#struct-1147909"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">1042822</idno>
                <idno type="issn">2708-8340</idno>
                <title level="j">Journal of Micro/Nanopatterning, Materials, and Metrology</title>
                <imprint>
                  <publisher>SPIE</publisher>
                  <biblScope unit="volume">24</biblScope>
                  <biblScope unit="issue">4</biblScope>
                  <biblScope unit="pp">041406</biblScope>
                  <date type="datePub">2025-10-09</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1117/1.JMM.24.4.041406</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <classCode scheme="halDomain" n="info.info-lg">Computer Science [cs]/Machine Learning [cs.LG]</classCode>
              <classCode scheme="halDomain" n="info.info-ts">Computer Science [cs]/Signal and Image Processing</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="institution" xml:id="struct-1147909" status="INCOMING">
          <orgName>POLLEN METROLOGY</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="laboratory" xml:id="struct-1063677" status="VALID">
          <idno type="IdRef">155645919</idno>
          <idno type="RNSR">200212221E</idno>
          <idno type="ROR">00t3fpp34</idno>
          <orgName>Laboratoire d'Informatique, de Modélisation et d'Optimisation des Systèmes</orgName>
          <orgName type="acronym">LIMOS</orgName>
          <date type="start">2021-01-01</date>
          <desc>
            <address>
              <addrLine>Campus Universitaire des Cézeaux, 1 rue de la Chebarde, TSA 60125 / CS 60026, 63178 Aubière Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://limos.fr/</ref>
          </desc>
          <listRelation>
            <relation name="UMR6158" active="#struct-359750" type="direct"/>
            <relation name="UMR6158" active="#struct-441569" type="direct"/>
            <relation name="UMR6158" active="#struct-1063463" type="direct"/>
            <relation name="UMR6158" active="#struct-1063539" type="direct"/>
            <relation active="#struct-1063463" type="direct"/>
          </listRelation>
        </org>
        <org type="department" xml:id="struct-1043270" status="VALID">
          <idno type="IdRef">184701376</idno>
          <idno type="RNSR">200316919G</idno>
          <idno type="ROR">03e044190</idno>
          <orgName>SPINtronique et TEchnologie des Composants</orgName>
          <orgName type="acronym">SPINTEC</orgName>
          <date type="start">2020-01-01</date>
          <desc>
            <address>
              <addrLine>Institut de Recherche Interdisciplinaire de GrenobleCEA-Grenoble17, avenue des Martyrs 38054 GRENOBLE CEDEX 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.spintec.fr/</ref>
          </desc>
          <listRelation>
            <relation name="UMR8191" active="#struct-441569" type="direct"/>
            <relation name="DRF/IRIG/DEPHY" active="#struct-555292" type="direct"/>
            <relation name="DRF/IRIG" active="#struct-465913" type="indirect"/>
            <relation active="#struct-300016" type="indirect"/>
            <relation active="#struct-1042703" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-490706" status="OLD">
          <idno type="IdRef">155645919</idno>
          <idno type="RNSR">200212221E</idno>
          <orgName>Laboratoire d'Informatique, de Modélisation et d'Optimisation des Systèmes</orgName>
          <orgName type="acronym">LIMOS</orgName>
          <date type="start">2017-01-01</date>
          <date type="end">2020-12-31</date>
          <desc>
            <address>
              <addrLine>Campus Universitaire des Cézeaux, 1 rue de la Chebarde, TSA 60125 / CS 60026, 63178 Aubière Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://limos.fr/</ref>
          </desc>
          <listRelation>
            <relation name="UMR6158" active="#struct-359750" type="direct"/>
            <relation name="UMR6158" active="#struct-422708" type="direct"/>
            <relation name="UMR6158" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-359750" status="VALID">
          <idno type="IdRef">028028694</idno>
          <orgName>Ecole Nationale Supérieure des Mines de St Etienne</orgName>
          <orgName type="acronym">ENSM ST-ETIENNE</orgName>
          <date type="start">1816-01-01</date>
          <desc>
            <address>
              <addrLine>158 Cour Fauriel, 42100 Saint-Étienne</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.mines-stetienne.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-1063463" status="VALID">
          <idno type="IdRef">252404955</idno>
          <idno type="ISNI">0000000115480420</idno>
          <idno type="ROR">https://ror.org/01a8ajp46</idno>
          <orgName>Université Clermont Auvergne</orgName>
          <orgName type="acronym">UCA</orgName>
          <date type="start">2021-01-01</date>
          <desc>
            <address>
              <addrLine>49, bd François-Mitterrand / CS 60032 / 63001 Clermont-Ferrand Cedex 1</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.uca.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-1063539" status="VALID">
          <idno type="IdRef">252428943</idno>
          <orgName>Institut national polytechnique Clermont Auvergne</orgName>
          <orgName type="acronym">INP Clermont Auvergne</orgName>
          <date type="start">2021-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
          <listRelation>
            <relation active="#struct-1063463" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-555292" status="VALID">
          <idno type="IdRef">240648846</idno>
          <idno type="RNSR">201923169F</idno>
          <idno type="ROR">https://ror.org/00byxdz40</idno>
          <idno type="Wikidata">Q108737333</idno>
          <orgName>Institut de Recherche Interdisciplinaire de Grenoble</orgName>
          <orgName type="acronym">IRIG</orgName>
          <date type="start">2019-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://hal-cea.archives-ouvertes.fr/IRIG/</ref>
          </desc>
          <listRelation>
            <relation name="DRF/IRIG" active="#struct-465913" type="direct"/>
            <relation active="#struct-300016" type="indirect"/>
          </listRelation>
        </org>
        <org type="regrouplaboratory" xml:id="struct-465913" status="VALID">
          <idno type="IdRef">251118436</idno>
          <idno type="RNSR">201622496M</idno>
          <idno type="ROR">https://ror.org/01yvj5k91</idno>
          <idno type="Wikidata">Q52604525</idno>
          <orgName>Direction de Recherche Fondamentale (CEA)</orgName>
          <orgName type="acronym">DRF (CEA)</orgName>
          <date type="start">2016-01-01</date>
          <desc>
            <address>
              <addrLine>Direction de Recherche FondamentaleFundamental Research DivisionCEA Saclay91191 Gif-sur-Yvette</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://ceasciences.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-300016" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-300016" status="VALID">
          <idno type="IdRef">026372061</idno>
          <idno type="ISNI">0000000122998025</idno>
          <idno type="ROR">https://ror.org/00jjx8s55</idno>
          <idno type="Wikidata">Q868550</idno>
          <orgName>Commissariat à l'énergie atomique et aux énergies alternatives</orgName>
          <orgName type="acronym">CEA</orgName>
          <desc>
            <address>
              <addrLine>Centre de SaclayCentre de GrenobleCentre de Cadaracheetc</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cea.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-1042703" status="VALID">
          <idno type="IdRef">240648315</idno>
          <idno type="ROR">https://ror.org/02rx3b187</idno>
          <orgName>Université Grenoble Alpes</orgName>
          <orgName type="acronym">UGA</orgName>
          <date type="start">2020-01-01</date>
          <desc>
            <address>
              <addrLine>Adresse CS 40700 - 38058 Grenoble cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-grenoble-alpes.fr</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-422708" status="OLD">
          <idno type="IdRef">196200032</idno>
          <idno type="ROR">https://ror.org/01a8ajp46</idno>
          <orgName>Université Clermont Auvergne [2017-2020]</orgName>
          <orgName type="acronym">UCA  [2017-2020]</orgName>
          <date type="start">2017-01-01</date>
          <date type="end">2020-12-31</date>
          <desc>
            <address>
              <addrLine>49, bd François-Mitterrand / CS 60032 / 63001 Clermont-Ferrand Cedex 1</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.uca.fr/</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>