<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-05250892</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-15T15:21:31+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Low-temperature, high-throughput spatial atomic layer deposition of NiOx nanocrystalline thin films from [Ni(ipki)2]</title>
            <author role="aut">
              <persName>
                <forename type="first">Samuel</forename>
                <surname>Porcar</surname>
              </persName>
              <idno type="idhal" notation="numeric">1581516</idno>
              <idno type="halauthorid" notation="string">3765961-1581516</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-1382-6181</idno>
              <affiliation ref="#struct-104792"/>
              <affiliation ref="#struct-1225963"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Marcel</forename>
                <surname>Schmickler</surname>
              </persName>
              <idno type="idhal" notation="numeric">1581517</idno>
              <idno type="halauthorid" notation="string">3765962-1581517</idno>
              <idno type="ORCID">https://orcid.org/0009-0007-3485-4118</idno>
              <affiliation ref="#struct-1150306"/>
              <affiliation ref="#struct-202127"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Hayri</forename>
                <surname>Okcu</surname>
              </persName>
              <idno type="idhal" notation="numeric">1580987</idno>
              <idno type="halauthorid" notation="string">3200076-1580987</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-5623-4023</idno>
              <affiliation ref="#struct-1043330"/>
              <affiliation ref="#struct-1185646"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Jorit</forename>
                <surname>Obenlüneschloß</surname>
              </persName>
              <idno type="idhal" notation="numeric">1424549</idno>
              <idno type="halauthorid" notation="string">3258173-1424549</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-8694-6443</idno>
              <affiliation ref="#struct-1150306"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Stefano</forename>
                <surname>D’ercole</surname>
              </persName>
              <idno type="idhal" notation="numeric">1581518</idno>
              <idno type="halauthorid" notation="string">3765963-1581518</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-0611-372X</idno>
              <affiliation ref="#struct-1043330"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Laura Cervera-</forename>
                <surname>Gabalda</surname>
              </persName>
              <idno type="halauthorid">3765964-0</idno>
              <affiliation ref="#struct-339765"/>
              <affiliation ref="#struct-503385"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Itziar</forename>
                <surname>Galarreta-Rodriguez</surname>
              </persName>
              <idno type="idhal" notation="numeric">1581519</idno>
              <idno type="halauthorid" notation="string">3560635-1581519</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-9172-4319</idno>
              <affiliation ref="#struct-503385"/>
              <affiliation ref="#struct-339765"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Juan</forename>
                <surname>Rubio-Zuazo</surname>
              </persName>
              <idno type="halauthorid">1355452-0</idno>
              <affiliation ref="#struct-339765"/>
              <affiliation ref="#struct-503385"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Jaime Gonzalez</forename>
                <surname>Cuadra</surname>
              </persName>
              <idno type="halauthorid">3765965-0</idno>
              <affiliation ref="#struct-104792"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Abderahim</forename>
                <surname>Lahlahi</surname>
              </persName>
              <idno type="idhal" notation="numeric">1581520</idno>
              <idno type="halauthorid" notation="string">3765966-1581520</idno>
              <idno type="ORCID">https://orcid.org/0009-0004-4380-8824</idno>
              <affiliation ref="#struct-104792"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Diego</forename>
                <surname>Fraga</surname>
              </persName>
              <idno type="halauthorid">3765967-0</idno>
              <affiliation ref="#struct-104792"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Camilo</forename>
                <surname>Sanchez-Velasquez</surname>
              </persName>
              <idno type="idhal" notation="numeric">815393</idno>
              <idno type="halauthorid" notation="string">2343282-815393</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-2874-4522</idno>
              <affiliation ref="#struct-1043330"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Daniel</forename>
                <surname>Bellet</surname>
              </persName>
              <email type="md5">1723075c7a1bda37548f407771b3f0e7</email>
              <email type="domain">grenoble-inp.fr</email>
              <ptr type="url" target="https://lmgp.grenoble-inp.fr/fr/annuaire/m-bellet-daniel"/>
              <idno type="idhal" notation="string">daniel-bellet-grenoble</idno>
              <idno type="idhal" notation="numeric">1120923</idno>
              <idno type="halauthorid" notation="string">497765-1120923</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-9929-3696</idno>
              <idno type="IDREF">https://www.idref.fr/086029266</idno>
              <affiliation ref="#struct-1043330"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Thomas</forename>
                <surname>Fix</surname>
              </persName>
              <email type="md5">53bdaab3813fe8f8a9bfde96d134ab7f</email>
              <email type="domain">unistra.fr</email>
              <idno type="idhal" notation="string">thomas-fix</idno>
              <idno type="idhal" notation="numeric">748702</idno>
              <idno type="halauthorid" notation="string">34454-748702</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/R-8584-2016</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-1531-725X</idno>
              <idno type="IDREF">https://www.idref.fr/12078212X</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/R-8584-2016</idno>
              <affiliation ref="#struct-217648"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Juan</forename>
                <forename type="middle">B</forename>
                <surname>Carda</surname>
              </persName>
              <idno type="idhal" notation="numeric">1581521</idno>
              <idno type="halauthorid" notation="string">3765968-1581521</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-4277-6179</idno>
              <affiliation ref="#struct-104792"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Anjana</forename>
                <surname>Devi</surname>
              </persName>
              <idno type="halauthorid">1291484-0</idno>
              <affiliation ref="#struct-202127"/>
              <affiliation ref="#struct-96520"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">David</forename>
                <surname>Muñoz-Rojas</surname>
              </persName>
              <email type="md5">0d6fce5aa0da902206a64106d7fd3cb8</email>
              <email type="domain">grenoble-inp.fr</email>
              <idno type="idhal" notation="string">david-munoz-rojas</idno>
              <idno type="idhal" notation="numeric">738331</idno>
              <idno type="halauthorid" notation="string">1342969-738331</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/C-1227-2010</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-1234-0814</idno>
              <idno type="GOOGLE SCHOLAR">https://scholar.google.com/citations?user=_BvaY5MAAAAJ&amp;hl=en</idno>
              <idno type="IDREF">https://www.idref.fr/192780107</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/C-1227-2010</idno>
              <affiliation ref="#struct-1043330"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Thomas</forename>
                <surname>Fix</surname>
              </persName>
              <email type="md5">53bdaab3813fe8f8a9bfde96d134ab7f</email>
              <email type="domain">unistra.fr</email>
            </editor>
            <funder ref="#projanr-37846"/>
            <funder ref="#projanr-57528"/>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2025-09-11 21:05:44</date>
              <date type="whenModified">2026-03-03 16:40:45</date>
              <date type="whenReleased">2025-09-12 11:43:12</date>
              <date type="whenProduced">2025-09</date>
              <date type="whenEndEmbargoed">2025-09-11</date>
              <ref type="file" target="https://hal.science/hal-05250892v1/document">
                <date notBefore="2025-09-11"/>
              </ref>
              <ref type="file" subtype="greenPublisher" n="1" target="https://hal.science/hal-05250892v1/file/1-s2.0-S2666523925001461-main.pdf" id="file-5250892-4511566">
                <date notBefore="2025-09-11"/>
              </ref>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="805237">
                <persName>
                  <forename>Thomas</forename>
                  <surname>Fix</surname>
                </persName>
                <email type="md5">53bdaab3813fe8f8a9bfde96d134ab7f</email>
                <email type="domain">unistra.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-05250892</idno>
            <idno type="halUri">https://hal.science/hal-05250892</idno>
            <idno type="halBibtex">porcar:hal-05250892</idno>
            <idno type="halRefHtml">&lt;i&gt;Applied Surface Sciences Advances&lt;/i&gt;, 2025, 29, pp.100836. &lt;a target="_blank" href="https://dx.doi.org/10.1016/j.apsadv.2025.100836"&gt;&amp;#x27E8;10.1016/j.apsadv.2025.100836&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Applied Surface Sciences Advances, 2025, 29, pp.100836. &amp;#x27E8;10.1016/j.apsadv.2025.100836&amp;#x27E9;</idno>
            <availability status="restricted">
              <licence target="https://creativecommons.org/licenses/by/4.0/">CC BY 4.0 - Attribution<ref corresp="#file-5250892-4511566"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-SAVOIE">Université Savoie Mont Blanc</idno>
            <idno type="stamp" n="UGA">HAL Grenoble Alpes</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="ENGEES">Ecole Nationale du Génie de l'Eau et de l'Environnement de Strasbourg</idno>
            <idno type="stamp" n="INPG">Institut polytechnique de Grenoble</idno>
            <idno type="stamp" n="UNIV-STRASBG">Université de Strasbourg</idno>
            <idno type="stamp" n="LMGP" corresp="FMNT">LMGP - Laboratoire des matériaux et du génie physique</idno>
            <idno type="stamp" n="INSA-STRASBOURG">Institut National des Sciences Appliquées de Strasbourg</idno>
            <idno type="stamp" n="INC-CNRS">Institut de Chimie du CNRS</idno>
            <idno type="stamp" n="AGREENIUM">Archive ouverte en agrobiosciences</idno>
            <idno type="stamp" n="SITE-ALSACE">Archive ouverte du site Alsace</idno>
            <idno type="stamp" n="INSA-GROUPE">Groupe INSA</idno>
            <idno type="stamp" n="UGA-EPE">Université Grenoble Alpes [2020-*]</idno>
            <idno type="stamp" n="ANR">ANR</idno>
            <idno type="stamp" n="CROMA" corresp="UNIV-SAVOIE">Centre de Radiofréquences, Optique et Micro-nanoélectronique des Alpes</idno>
            <idno type="stamp" n="UNIVOAK">UNIVOAK</idno>
            <idno type="stamp" n="ESRF"> European Synchrotron Radiation Facility</idno>
            <idno type="stamp" n="UMR7357">Laboratoire des sciences de l’ingénieur, de l’informatique et de l’imagerie</idno>
            <idno type="stamp" n="TEST-UGA">TEST-UGA</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Low-temperature, high-throughput spatial atomic layer deposition of NiOx nanocrystalline thin films from [Ni(ipki)2]</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Samuel</forename>
                    <surname>Porcar</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">1581516</idno>
                  <idno type="halauthorid" notation="string">3765961-1581516</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-1382-6181</idno>
                  <affiliation ref="#struct-104792"/>
                  <affiliation ref="#struct-1225963"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Marcel</forename>
                    <surname>Schmickler</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">1581517</idno>
                  <idno type="halauthorid" notation="string">3765962-1581517</idno>
                  <idno type="ORCID">https://orcid.org/0009-0007-3485-4118</idno>
                  <affiliation ref="#struct-1150306"/>
                  <affiliation ref="#struct-202127"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Hayri</forename>
                    <surname>Okcu</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">1580987</idno>
                  <idno type="halauthorid" notation="string">3200076-1580987</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-5623-4023</idno>
                  <affiliation ref="#struct-1043330"/>
                  <affiliation ref="#struct-1185646"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Jorit</forename>
                    <surname>Obenlüneschloß</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">1424549</idno>
                  <idno type="halauthorid" notation="string">3258173-1424549</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-8694-6443</idno>
                  <affiliation ref="#struct-1150306"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Stefano</forename>
                    <surname>D’ercole</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">1581518</idno>
                  <idno type="halauthorid" notation="string">3765963-1581518</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-0611-372X</idno>
                  <affiliation ref="#struct-1043330"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Laura Cervera-</forename>
                    <surname>Gabalda</surname>
                  </persName>
                  <idno type="halauthorid">3765964-0</idno>
                  <affiliation ref="#struct-339765"/>
                  <affiliation ref="#struct-503385"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Itziar</forename>
                    <surname>Galarreta-Rodriguez</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">1581519</idno>
                  <idno type="halauthorid" notation="string">3560635-1581519</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-9172-4319</idno>
                  <affiliation ref="#struct-503385"/>
                  <affiliation ref="#struct-339765"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Juan</forename>
                    <surname>Rubio-Zuazo</surname>
                  </persName>
                  <idno type="halauthorid">1355452-0</idno>
                  <affiliation ref="#struct-339765"/>
                  <affiliation ref="#struct-503385"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Jaime Gonzalez</forename>
                    <surname>Cuadra</surname>
                  </persName>
                  <idno type="halauthorid">3765965-0</idno>
                  <affiliation ref="#struct-104792"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Abderahim</forename>
                    <surname>Lahlahi</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">1581520</idno>
                  <idno type="halauthorid" notation="string">3765966-1581520</idno>
                  <idno type="ORCID">https://orcid.org/0009-0004-4380-8824</idno>
                  <affiliation ref="#struct-104792"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Diego</forename>
                    <surname>Fraga</surname>
                  </persName>
                  <idno type="halauthorid">3765967-0</idno>
                  <affiliation ref="#struct-104792"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Camilo</forename>
                    <surname>Sanchez-Velasquez</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">815393</idno>
                  <idno type="halauthorid" notation="string">2343282-815393</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-2874-4522</idno>
                  <affiliation ref="#struct-1043330"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Daniel</forename>
                    <surname>Bellet</surname>
                  </persName>
                  <email type="md5">1723075c7a1bda37548f407771b3f0e7</email>
                  <email type="domain">grenoble-inp.fr</email>
                  <ptr type="url" target="https://lmgp.grenoble-inp.fr/fr/annuaire/m-bellet-daniel"/>
                  <idno type="idhal" notation="string">daniel-bellet-grenoble</idno>
                  <idno type="idhal" notation="numeric">1120923</idno>
                  <idno type="halauthorid" notation="string">497765-1120923</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-9929-3696</idno>
                  <idno type="IDREF">https://www.idref.fr/086029266</idno>
                  <affiliation ref="#struct-1043330"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Thomas</forename>
                    <surname>Fix</surname>
                  </persName>
                  <email type="md5">53bdaab3813fe8f8a9bfde96d134ab7f</email>
                  <email type="domain">unistra.fr</email>
                  <idno type="idhal" notation="string">thomas-fix</idno>
                  <idno type="idhal" notation="numeric">748702</idno>
                  <idno type="halauthorid" notation="string">34454-748702</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/R-8584-2016</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-1531-725X</idno>
                  <idno type="IDREF">https://www.idref.fr/12078212X</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/R-8584-2016</idno>
                  <affiliation ref="#struct-217648"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Juan</forename>
                    <forename type="middle">B</forename>
                    <surname>Carda</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">1581521</idno>
                  <idno type="halauthorid" notation="string">3765968-1581521</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-4277-6179</idno>
                  <affiliation ref="#struct-104792"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Anjana</forename>
                    <surname>Devi</surname>
                  </persName>
                  <idno type="halauthorid">1291484-0</idno>
                  <affiliation ref="#struct-202127"/>
                  <affiliation ref="#struct-96520"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">David</forename>
                    <surname>Muñoz-Rojas</surname>
                  </persName>
                  <email type="md5">0d6fce5aa0da902206a64106d7fd3cb8</email>
                  <email type="domain">grenoble-inp.fr</email>
                  <idno type="idhal" notation="string">david-munoz-rojas</idno>
                  <idno type="idhal" notation="numeric">738331</idno>
                  <idno type="halauthorid" notation="string">1342969-738331</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/C-1227-2010</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-1234-0814</idno>
                  <idno type="GOOGLE SCHOLAR">https://scholar.google.com/citations?user=_BvaY5MAAAAJ&amp;hl=en</idno>
                  <idno type="IDREF">https://www.idref.fr/192780107</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/C-1227-2010</idno>
                  <affiliation ref="#struct-1043330"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">166608</idno>
                <idno type="issn">2666-5239</idno>
                <title level="j">Applied Surface Sciences Advances</title>
                <imprint>
                  <publisher>Elsevier</publisher>
                  <biblScope unit="volume">29</biblScope>
                  <biblScope unit="pp">100836</biblScope>
                  <date type="datePub">2025-09</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1016/j.apsadv.2025.100836</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">NiO Thin film ALD SALD Transparent electrodes Charge selective layers</term>
              </keywords>
              <classCode scheme="halDomain" n="chim">Chemical Sciences</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>Spatial atomic layer deposition (SALD) is a recent ALD variant enabling much faster deposition rates, even at atmospheric pressure, making it ideal for scalable, low-cost devices. NiO x , a transparent p-type oxide, is widely used in emerging technologies like perovskite solar cells. However, no suitable SALD process for NiO thin films has been reported so far. In this work, we present the deposition of nanocrystalline NiO x thin films via SALD using a recent Ni precursor not yet explored for the ALD of NiO, namely, bis(4-(isopropylamino)pent-3en-2onato)nickel(II) or [Ni( i pki) 2 ]. O 2 has been used as coreactant, with higher deposition rates being achieved if H 2 O is added to the O 2 flow. A narrow ALD window has been obtained between 230 • C and 250 • C, where a GPC of 0.023 nm is observed. This corresponds to a deposition rate of 1.4 nm/min, which is 2 to 10 times faster than the rates reported for conventional ALD of NiO thin films. Remarkably, the growth onset of NiO x starts around only 170 • C. The transmittance of the films reaches nearly 97 % in the visible for 55 nm thick films. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) studies revealed a high homogeneity of the films. X-ray diffraction (XRD), Raman spectroscopy and X-ray absorption spectroscopy (XAS) studies confirm the presence of a cubic NiO x crystalline phase. Finally, NiO x films have been deposited on Ag nanowire networks, demonstrating the possibility of depositing homogeneous and conformal coatings with this new process.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="institution" xml:id="struct-104792" status="VALID">
          <idno type="ROR">https://ror.org/02ws1xc11</idno>
          <orgName>Universitat Jaume I = Jaume I University</orgName>
          <desc>
            <address>
              <addrLine>Universitat Jaume I Av. de Vicent Sos Baynat s/n 12071 Castelló de la Plana CIF:Q-6250003-H</addrLine>
              <country key="ES"/>
            </address>
            <ref type="url">http://www.uji.es/</ref>
          </desc>
        </org>
        <org type="researchteam" xml:id="struct-1225963" status="OLD">
          <orgName>Matériaux pour Composants Electroniques et Photovoltaïques</orgName>
          <orgName type="acronym">ICube-MaCEPV</orgName>
          <date type="end">2024-02-29</date>
          <desc>
            <address>
              <addrLine>300 bd Sébastien Brant - F-67412 Illkirch Cedex</addrLine>
              <country key="FR"/>
            </address>
          </desc>
          <listRelation>
            <relation active="#struct-217648" type="direct"/>
            <relation active="#struct-94023" type="indirect"/>
            <relation active="#struct-199013" type="indirect"/>
            <relation active="#struct-211628" type="indirect"/>
            <relation active="#struct-261615" type="indirect"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation name="UMR7357" active="#struct-441569" type="indirect"/>
            <relation active="#struct-529627" type="indirect"/>
            <relation name="FR3627" active="#struct-199013" type="indirect"/>
            <relation active="#struct-237692" type="indirect"/>
            <relation active="#struct-303623" type="indirect"/>
            <relation active="#struct-341038" type="indirect"/>
            <relation name="FR3627" active="#struct-441569" type="indirect"/>
            <relation active="#struct-529628" type="indirect"/>
            <relation name="FR3678" active="#struct-199013" type="indirect"/>
            <relation active="#struct-441569" type="indirect"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-1150306" status="VALID">
          <idno type="ROR">https://ror.org/04tsk2644</idno>
          <orgName>Ruhr University Bochum = Ruhr-Universität Bochum [Bochum]</orgName>
          <orgName type="acronym">RUB</orgName>
          <desc>
            <address>
              <addrLine>RUHR-UNIVERSITÄT BOCHUM Universitätsstraße 150 44801 Bochum</addrLine>
              <country key="DE"/>
            </address>
          </desc>
        </org>
        <org type="regrouplaboratory" xml:id="struct-202127" status="VALID">
          <orgName>Leibniz Institute for Solid State and Materials Research</orgName>
          <orgName type="acronym">IFW Dresden</orgName>
          <desc>
            <address>
              <addrLine>Helmholtzstraße 20, D-01069 Dresden</addrLine>
              <country key="DE"/>
            </address>
            <ref type="url">https://www.ifw-dresden.de</ref>
          </desc>
          <listRelation>
            <relation active="#struct-308165" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-1043330" status="VALID">
          <idno type="IdRef">184736579</idno>
          <idno type="ISNI">0000 0004 0386 4138</idno>
          <idno type="RNSR">199512057G</idno>
          <idno type="ROR">https://ror.org/014n97s28</idno>
          <orgName>Laboratoire des matériaux et du génie physique</orgName>
          <orgName type="acronym">LMGP</orgName>
          <date type="start">2020-01-01</date>
          <desc>
            <address>
              <addrLine>Grenoble INP Minatec - 3 parvis Louis Néel - CS 50257- 38016 Grenoble Cedex 1</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.lmgp.grenoble-inp.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-341038" type="direct"/>
            <relation name="UMR5628" active="#struct-441569" type="direct"/>
            <relation active="#struct-1043329" type="direct"/>
            <relation active="#struct-1042703" type="indirect"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-1185646" status="VALID">
          <idno type="IdRef">18021621X</idno>
          <idno type="RNSR">200111812P</idno>
          <idno type="ROR">https://ror.org/050rs7291</idno>
          <orgName>Centre de Radiofréquences, Optique et Micro-nanoélectronique des Alpes</orgName>
          <orgName type="acronym">CROMA</orgName>
          <date type="start">2024-01-01</date>
          <desc>
            <address>
              <addrLine>Site de Grenoble : Grenoble INP - Minatec - 3, Parvis Louis Néel , CS 50257 - 38016 Grenoble Cedex 1 / Site de Chambéry : Université Savoie Mont Blanc - Rue Lac de la Thuile, Bat. 21 - 73370 Le Bourget du Lac</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://croma.grenoble-inp.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-432896" type="direct"/>
            <relation name="UMR5130" active="#struct-441569" type="direct"/>
            <relation name="inp" active="#struct-1042703" type="direct"/>
            <relation active="#struct-1043329" type="direct"/>
            <relation active="#struct-1042703" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-339765" status="VALID">
          <idno type="ROR">https://ror.org/02550n020</idno>
          <orgName>European Synchrotron Radiation Facility [Grenoble]</orgName>
          <orgName type="acronym">ESRF</orgName>
          <date type="start">2015-01-01</date>
          <desc>
            <address>
              <addrLine>71, avenue des Martyrs, CS 40220, 38043 Grenoble Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.esrf.fr/</ref>
          </desc>
        </org>
        <org type="regrouplaboratory" xml:id="struct-503385" status="VALID">
          <orgName>Instituto de Ciencia de Materiales de Madrid</orgName>
          <orgName type="acronym">ICMM</orgName>
          <desc>
            <address>
              <addrLine>Calle Sor Juana Inés de la Cruz, 3, 28049 Madrid, Espagne</addrLine>
              <country key="ES"/>
            </address>
            <ref type="url">https://www.icmm.csic.es</ref>
          </desc>
          <listRelation>
            <relation active="#struct-106380" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-217648" status="VALID">
          <idno type="IdRef">176969721</idno>
          <idno type="RNSR">201320497C</idno>
          <idno type="ROR">https://ror.org/00k4e5n71</idno>
          <idno type="Wikidata">Q30262162</idno>
          <orgName>Laboratoire des sciences de l'ingénieur, de l'informatique et de l'imagerie</orgName>
          <orgName type="acronym">ICube</orgName>
          <date type="start">2013-01-01</date>
          <desc>
            <address>
              <addrLine>300 bd Sébastien Brant - BP 10413 - F-67412 Illkirch Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://icube.unistra.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-94023" type="direct"/>
            <relation active="#struct-199013" type="direct"/>
            <relation active="#struct-211628" type="direct"/>
            <relation active="#struct-261615" type="direct"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation name="UMR7357" active="#struct-441569" type="direct"/>
            <relation active="#struct-529627" type="direct"/>
            <relation name="FR3627" active="#struct-199013" type="direct"/>
            <relation active="#struct-237692" type="indirect"/>
            <relation active="#struct-303623" type="indirect"/>
            <relation active="#struct-341038" type="indirect"/>
            <relation name="FR3627" active="#struct-441569" type="direct"/>
            <relation active="#struct-529628" type="direct"/>
            <relation name="FR3678" active="#struct-199013" type="direct"/>
            <relation active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-96520" status="VALID">
          <idno type="ROR">https://ror.org/042aqky30</idno>
          <orgName>Technische Universität Dresden = Dresden University of Technology</orgName>
          <orgName type="acronym">TU Dresden</orgName>
          <desc>
            <address>
              <addrLine>TU Dresden 01062 Dresden</addrLine>
              <country key="DE"/>
            </address>
            <ref type="url">http://tu-dresden.de/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-94023" status="VALID">
          <idno type="ROR">https://ror.org/02jhjzd11</idno>
          <orgName>École Nationale du Génie de l'Eau et de l'Environnement de Strasbourg</orgName>
          <orgName type="acronym">ENGEES</orgName>
          <desc>
            <address>
              <addrLine>1 quai Koch - BP 61039 - 67070 Strasbourg Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://engees.unistra.fr</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-199013" status="VALID">
          <idno type="IdRef">131056549</idno>
          <idno type="ROR">https://ror.org/00pg6eq24</idno>
          <orgName>Université de Strasbourg</orgName>
          <orgName type="acronym">UNISTRA</orgName>
          <desc>
            <address>
              <addrLine>4 rue Blaise Pascal - CS 90032 - 67081 Strasbourg cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.unistra.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-211628" status="VALID">
          <idno type="IdRef">030378842</idno>
          <idno type="ROR">https://ror.org/04bckew43</idno>
          <orgName>Hôpitaux Universitaires de Strasbourg</orgName>
          <orgName type="acronym">HUS</orgName>
          <desc>
            <address>
              <addrLine>1 place de l'hôpital BP 426 67091 Strasbourg cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.chru-strasbourg.fr/</ref>
          </desc>
        </org>
        <org type="regrouplaboratory" xml:id="struct-261615" status="VALID">
          <orgName>Institut National des Sciences Appliquées - Strasbourg</orgName>
          <orgName type="acronym">INSA Strasbourg</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.insa-strasbourg.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-301232" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-301232" status="VALID">
          <idno type="IdRef">162105150</idno>
          <orgName>Institut National des Sciences Appliquées</orgName>
          <orgName type="acronym">INSA</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="regrouplaboratory" xml:id="struct-529627" status="VALID">
          <idno type="RNSR">201420878M</idno>
          <orgName>Matériaux et Nanosciences Grand-Est</orgName>
          <orgName type="acronym">MNGE</orgName>
          <date type="start">2014-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
          <listRelation>
            <relation name="FR3627" active="#struct-199013" type="direct"/>
            <relation active="#struct-237692" type="direct"/>
            <relation active="#struct-303623" type="direct"/>
            <relation active="#struct-341038" type="direct"/>
            <relation name="FR3627" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-237692" status="VALID">
          <idno type="IdRef">026403250</idno>
          <idno type="ISNI">0000000404735039</idno>
          <idno type="ROR">https://ror.org/04k8k6n84</idno>
          <orgName>Université de Haute-Alsace (UHA) Mulhouse - Colmar</orgName>
          <orgName type="acronym">Université de Haute-Alsace (UHA)</orgName>
          <desc>
            <address>
              <addrLine>2, rue des Frères Lumière F-68093 Mulhouse Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.uha.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-303623" status="VALID">
          <idno type="IdRef">026388278</idno>
          <idno type="ROR">https://ror.org/02vjkv261</idno>
          <orgName>Institut National de la Santé et de la Recherche Médicale</orgName>
          <orgName type="acronym">INSERM</orgName>
          <desc>
            <address>
              <addrLine>101, rue de Tolbiac, 75013 Paris</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.inserm.fr</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-341038" status="VALID">
          <idno type="IdRef">232435103</idno>
          <idno type="ISNI">000000010626358X</idno>
          <idno type="ROR">https://ror.org/02cte4b68</idno>
          <orgName>Institut de Chimie - CNRS Chimie</orgName>
          <orgName type="acronym">INC-CNRS</orgName>
          <date type="start">2009-10-01</date>
          <desc>
            <address>
              <addrLine>CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE3 rue Michel-Ange75794 PARIS CEDEX 16 - France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cnrs.fr/inc</ref>
          </desc>
        </org>
        <org type="regrouplaboratory" xml:id="struct-529628" status="VALID">
          <orgName>Réseau nanophotonique et optique</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
          <listRelation>
            <relation name="FR3678" active="#struct-199013" type="direct"/>
            <relation active="#struct-237692" type="direct"/>
            <relation active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-308165" status="VALID">
          <idno type="IdRef">274479796</idno>
          <idno type="ISNI">0000000122243060</idno>
          <idno type="ROR">https://ror.org/01n6r0e97</idno>
          <idno type="Wikidata">Q680090</idno>
          <orgName>Leibniz Association = Leibniz Gemeinschaft = Wissenschaftsgemeinschaft Gottfried Wilhelm Leibniz</orgName>
          <orgName type="acronym">LG / WGL</orgName>
          <date type="start">1995-01-01</date>
          <desc>
            <address>
              <addrLine>Leibniz-GemeinschaftChausseestraße 11110115 Berlin</addrLine>
              <country key="DE"/>
            </address>
            <ref type="url">https://www.leibniz-gemeinschaft.de/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-1043329" status="VALID">
          <idno type="IdRef">026388804</idno>
          <idno type="ROR">https://ror.org/05sbt2524</idno>
          <orgName>Institut polytechnique de Grenoble - Grenoble Institute of Technology</orgName>
          <orgName type="acronym">Grenoble INP</orgName>
          <date type="start">2020-01-01</date>
          <desc>
            <address>
              <addrLine>46 avenue Félix Viallet 38031 Grenoble Cedex 1</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.grenoble-inp.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-1042703" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-1042703" status="VALID">
          <idno type="IdRef">240648315</idno>
          <idno type="ROR">https://ror.org/02rx3b187</idno>
          <orgName>Université Grenoble Alpes</orgName>
          <orgName type="acronym">UGA</orgName>
          <date type="start">2020-01-01</date>
          <desc>
            <address>
              <addrLine>Adresse CS 40700 - 38058 Grenoble cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-grenoble-alpes.fr</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-432896" status="VALID">
          <idno type="ROR">https://ror.org/04gqg1a07</idno>
          <orgName>Université Savoie Mont Blanc</orgName>
          <orgName type="acronym">USMB [Université de Savoie] [Université de Chambéry]</orgName>
          <date type="start">1979-10-01</date>
          <desc>
            <address>
              <addrLine>27, rue Marcoz - 73000 Chambéry</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.univ-smb.fr</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-106380" status="VALID">
          <idno type="IdRef">026373246</idno>
          <idno type="ISNI">0000000123535612</idno>
          <idno type="ROR">https://ror.org/02gfc7t72</idno>
          <idno type="Wikidata">Q74202089</idno>
          <orgName>Consejo Superior de Investigaciones Cientificas [España] = Spanish National Research Council [Spain]</orgName>
          <orgName type="acronym">CSIC</orgName>
          <date type="start">1939-01-01</date>
          <desc>
            <address>
              <addrLine>Serrano 117, 28006, Madrid</addrLine>
              <country key="ES"/>
            </address>
            <ref type="url">http://www.csic.es/</ref>
          </desc>
        </org>
      </listOrg>
      <listOrg type="projects">
        <org type="anrProject" xml:id="projanr-37846" status="VALID">
          <idno type="anr">ANR-10-LABX-0055</idno>
          <idno type="program">Laboratoires d'excellence</idno>
          <orgName>MINOS Lab</orgName>
          <desc>Minatec Novel Devices Scaling Laboratory</desc>
          <date type="start">2010</date>
        </org>
        <org type="anrProject" xml:id="projanr-57528" status="VALID">
          <idno type="anr">ANR-21-CE08-0047</idno>
          <orgName>REACTIVE</orgName>
          <desc>Nouveaux précurseurs et procédés plasma pour le dépôt de couche atomique spatiale. Vers des matériaux fonctionnels pour des applications avancées</desc>
          <date type="start">2021</date>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>