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            <title xml:lang="en">Growth of “quantum-grade” single crystal diamond films and their integration into hybrid structures</title>
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              <p>Due to a set of favourable properties, diamond is foreseen as the ultimate semiconductor for power electronic devices operating under harsh environments. In the past decades, efforts on material development have contributed to improve the crystalline quality of the diamond films produced by the chemical vapour deposition (CVD) technique, which includes a strong reduction in impurities and extended defects such as dislocations. In addition, significant success has been achieved in increasing the lateral size of the diamond films, by exploiting either a “mosaic” approach1 or heteroepitaxial growth on a foreign substrate2. Thanks to this, the first diamond wafers for electronics are on the verge of being commercialized at an industrial scale. Leveraging on those developments, the use of diamond as a solid-state material for quantum technologies has also witnessed tremendous progress3. It essentially relies on the use of a specific point defect, the nitrogen-vacancy (NV) centre which spin-state can be optically read-out and manipulated with exceptionally long coherence time (up to 2 ms) even at room temperature. Based on this property, disrupting quantum devices having a far superior performance to standard classical systems are foreseen for a wide range of fields including health, communications, security and environment. Nanoscale magnetic or electric sensors, temperature sensors, single photon emitters for cryptography and information processing are among the many devices that could find industrial application in quantum technologies. The material requirements though are even more stringent than for electronics, with the need to control isotopic enrichment (i.e. 13C depleted growth), strain and purity to an unprecedented level. The spatial positioning of the colour centres as well as their crystallographic orientation is also crucial. In all these areas, important progresses in material fabrication have already been achieved. In addition to all-diamond based devices, the combination of NV centres with other quantum platforms can open interesting perspectives to extend the functionalities of the devices, by favouring for example operation in the infrared range or taking benefit from longer spin coherence times offered by other systems. In this context, the first demonstrations of hybrid diamond-based sensors combined with other quantum systems are just starting to emerge. In this presentation, I will review the efforts dedicated to improving single crystal diamond films from the point of view of synthesis and material enhancement technologies that are key resources. The constraints inherent to the creation of colour centres with good properties in an ultra-pure matrix either by in-situ doping or by implantation using a focused ion beam will be described. Eventually, the combination of diamond films containing NV centres together with oxide thin films doped with rare-earth elements, another successful platform for quantum applications, will be assessed4. 1 S. Ohmagari, H. Yamada, N. Tsubouchi, H. Umezawa, A. Chayahara, A. Seki, F. Kawaii, H. Saitoh, and Y. Mokuno, “Schottky barrier diodes fabricated on diamond mosaic wafers: Dislocation reduction to mitigate the effect of coalescence boundaries,” Appl. Phys. Lett. 114(8), 082104 (2019).2 J.-C. Arnault, S. Saada, and V. Ralchenko, “Chemical Vapor Deposition Single-Crystal Diamond: A Review,” Physica Status Solidi (RRL) – Rapid Research Letters 16(1), 2100354 (2022).3 J. Achard, V. Jacques, and A. Tallaire, “CVD diamond single crystals with NV centres: a review of material synthesis and technology for quantum sensing applications,” J. Phys. D: Appl. Phys., (2020).4 I.G. Balașa, M.A. Arranz-Martinez, P. Perrin, M. Ngandeu Ngambou, A. Hebbrecht, D. Serrano, J. Achard, A. Tallaire, and P. Goldner, “Rare Earth-Diamond Hybrid Structures for Optical Quantum Technologies,” Advanced Optical Materials 12(31), 2401487 (2024).Acknowledgements: This project has received funding from the European Research Council (ERC) under the European Union’s Horizon 2020 research and innovation program (RareDiamond, grant agreement No 101019234).</p>
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