PRELIMINARY STUDY OF A MEMS PHOTOACOUSTIC PRESSURE SENSOR USING PARAMETRIC RESONANCE
Résumé
Photo-Acoustic Sensing (PAS) is an emerging gas sensing technique
• Selectivity, sensitivity, etc.
• Requires a low-noise narrowband (resonator-based) microphone
Conclusion Proposed instrumentation and simulation results
| Origine | Fichiers produits par l'(les) auteur(s) |
|---|---|
| Licence |