High frequency diffuse acoustic field correlation for defect detection in Silicon wafers
Résumé
This project is funded by Agence Nationale de le Recherche ANR: DACLOS N°:ANR-21-CE42-0002-01 This work aims to advance the microelectronics industry by developing a non-destructive inspection method for imaging and locating defects on silicon wafers.This thesis is part of the ANR DACLOS project, which aims to develop a non-destructive inspection method based on HF diffuse field correlation in silicon wafers. The project aims to detect and image defects by combining optical detection with the surface acoustic wave correlation approach.
Domaines
| Origine | Fichiers produits par l'(les) auteur(s) |
|---|---|
| Licence |