Poster De Conférence Année : 2025

High frequency diffuse acoustic field correlation for defect detection in Silicon wafers

Résumé

This project is funded by Agence Nationale de le Recherche ANR: DACLOS N°:ANR-21-CE42-0002-01 This work aims to advance the microelectronics industry by developing a non-destructive inspection method for imaging and locating defects on silicon wafers.This thesis is part of the ANR DACLOS project, which aims to develop a non-destructive inspection method based on HF diffuse field correlation in silicon wafers.  The project aims to detect and image defects by combining optical detection with the surface acoustic wave correlation approach.

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Dates et versions

hal-05031203 , version 1 (11-04-2025)

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Identifiants

  • HAL Id : hal-05031203 , version 1

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Nada Ben Jafela, Lynda Chehami, Marc Duquennoy, Emmanuel Moulin, Nikolay Smagin, et al.. High frequency diffuse acoustic field correlation for defect detection in Silicon wafers. C'Nano 2025: The Nanoscience Meeting, Mar 2025, Paris, France. ⟨hal-05031203⟩
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