Communication Dans Un Congrès Année : 2025

Enhancing Optical Properties of Ta2O5 Thin Films Grown by Radiofrequency Magnetron Sputtering through Rapid Thermal Annealing

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hal-04921799 , version 1 (30-01-2025)

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  • HAL Id : hal-04921799 , version 1

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Julien Cardin, Aïmane Cheikh, Jeremie Goncalves, C. Labbe, Xavier Portier, et al.. Enhancing Optical Properties of Ta2O5 Thin Films Grown by Radiofrequency Magnetron Sputtering through Rapid Thermal Annealing. E-MRS Fall Meeting ,Symposium I (Nano-engineered coatings and thin films: from fundamentals to applications), Strasbourg, France., E-MRS, Sep 2025, Varsovie, Poland. ⟨hal-04921799⟩
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