1200-V Fully Vertical GaN-on-Silicon p-i-n Diodes With Avalanche Capability and High On-State Current Above 10 A - Archive ouverte HAL
Article Dans Une Revue IEEE Transactions on Electron Devices Année : 2024

1200-V Fully Vertical GaN-on-Silicon p-i-n Diodes With Avalanche Capability and High On-State Current Above 10 A

Résumé

We report on fully vertical GaN-on-Silicon P-i-N diodes delivering above 1200 V soft breakdown voltage. Temperature dependence measurements indicate avalanche breakdown capability reflecting the high-quality processing and epitaxy growth. On-state characteristics of the fabricated vertical P-i-N diodes reveal on-resistances ranging from 0.48 m.cm² for small anode to 1.7 m.cm² for large anode diameters (i.e. 1 mm). The on-state resistance increase is attributed to the thermal dissipation issues. Nevertheless, the large devices exhibit high on-state current close to 12 A owing to an optimized process including a deep mesa etch as edge terminations and thick Cu layer for heat sink on the backside enabled by a polyimide passivation that strengthen the mechanical robustness of the membranes. To the best of our knowledge, this represents the first demonstration of fully vertical 1200 V GaN-based devices grown on silicon substrates with high current operation above 10 A, corresponding to a Baliga figure of merit of 3 GW/cm².

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Dates et versions

hal-04797737 , version 1 (22-11-2024)

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Youssef Hamdaoui, Sondre Michler, Adrien Bidaud, Katir Ziouche, Farid Medjdoub. 1200-V Fully Vertical GaN-on-Silicon p-i-n Diodes With Avalanche Capability and High On-State Current Above 10 A. IEEE Transactions on Electron Devices, 2024, pp.1-6. ⟨10.1109/TED.2024.3496440⟩. ⟨hal-04797737⟩
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