Nanoparticles synthesis in microwave plasmas: peculiarities and comprehensive insight - Archive ouverte HAL
Article Dans Une Revue Scientific Reports Année : 2024

Nanoparticles synthesis in microwave plasmas: peculiarities and comprehensive insight

Résumé

Abstract Low-pressure plasma processes are routinely used to grow, functionalize or etch materials, and thanks to some of its unique attributes, plasma has become a major player for some applications such as microelectronics. Plasma processes are however still at a research level when it comes to the synthesis and functionalization of nanoparticles. Yet plasma processes can offer a particularly suitable solution to produce nanoparticles having very peculiar features since they enable to: (i) reach particle with a variety of chemical compositions, (ii) tune the size and density of the particle cloud by acting on the transport dynamics of neutral or charged particles through a convenient setting of the thermal gradients or the electric field topology in the reactor chamber and (iii) manipulate nanoparticles and deposit them directly onto a substrate, or codeposit them along with a continuous film to produce nanocomposites or (iv) use them as a template to produce 1D materials. In this article, we present an experimental investigation of nanoparticles synthesis and dynamics in low-pressure microwave plasmas by combining time-resolved and in-situ laser extinction and scattering diagnostics, QCL absorption spectroscopy, mass spectrometry, optical emission spectroscopy and SEM along with a particle transport model. We showed for the first time the thermophoresis-driven dynamic of particle cloud in electrodless microwave plasmas. We showed that this effect is linked to particular fluctuations in the plasma composition and results in the formation of a void region in the bulk of the plasma surrounded by a particle cloud in the peripherical post-discharge. We also reveals and analyze the kinetics of precursor dissociation and molecular growth that result in the observed nanoparticle nucleation.
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Dates et versions

hal-04778272 , version 1 (18-11-2024)

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Karim Ouaras, Guillaume Lombardi, Khaled Hassouni. Nanoparticles synthesis in microwave plasmas: peculiarities and comprehensive insight. Scientific Reports, 2024, 14 (1), pp.4653. ⟨10.1038/s41598-023-49818-3⟩. ⟨hal-04778272⟩
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