%0 Journal Article %T Determining by Raman spectroscopy the average thickness and N -layer-specific surface coverages of MoS 2 thin films with domains much smaller than the laser spot size %+ Laboratoire Charles Coulomb (L2C) %+ Annealsys (Annealsys) %+ Institut Européen des membranes (IEM) %+ Centre Interdisciplinaire de Nanoscience de Marseille (CINaM) %A Wasem Klein, Felipe %A Huntzinger, Jean-Roch %A Astié, Vincent %A Voiry, Damien %A Parret, Romain %A Makhlouf, Houssine %A Juillaguet, Sandrine %A Decams, Jean-Manuel %A Contreras, Sylvie %A Landois, Périne %A Zahab, Ahmed-Azmi %A Sauvajol, Jean-Louis %A Paillet, Matthieu %< avec comité de lecture %@ 2190-4286 %J Beilstein Journal of Nanotechnology %I Karlsruhe Institute of Technology. %V 15 %P 279-296 %8 2024-03-07 %D 2024 %R 10.3762/bjnano.15.26 %M 38476324 %K Raman spectroscopy %K molybdenum disulfide %K number of layers %K thin film %K transition metal dichalcogenides %Z Chemical Sciences/Inorganic chemistryJournal articles %X Raman spectroscopy is a widely used technique to characterize nanomaterials because of its convenience, non-destructiveness, and sensitivity to materials change. The primary purpose of this work is to determine via Raman spectroscopy the average thickness of MoS 2 thin films synthesized by direct liquid injection pulsed-pressure chemical vapor deposition (DLI-PP-CVD). Such samples are constituted of nanoflakes (with a lateral size of typically 50 nm, i.e., well below the laser spot size), with possibly a distribution of thicknesses and twist angles between stacked layers. As an essential preliminary, we first reassess the applicability of different Raman criteria to determine the thicknesses (or layer number, N ) of MoS 2 flakes from measurements performed on reference samples, namely well-characterized mechanically exfoliated or standard chemical vapor deposition MoS 2 large flakes deposited on 90 ± 6 nm SiO 2 on Si substrates. Then, we discuss the applicability of the same criteria for significantly different DLI-PP-CVD MoS 2 samples with average thicknesses ranging from sub-monolayer up to three layers. Finally, an original procedure based on the measurement of the intensity of the layer breathing modes is proposed to evaluate the surface coverage for each N (i.e., the ratio between the surface covered by exactly N layers and the total surface) in DLI-PP-CVD MoS 2 samples. %G English %2 https://hal.science/hal-04747945v1/document %2 https://hal.science/hal-04747945v1/file/Determining_by_Raman_spectroscopy_the_average_thic.pdf %L hal-04747945 %U https://hal.science/hal-04747945 %~ CNRS %~ UNIV-AMU %~ ENSC-MONTPELLIER %~ IEM %~ L2C %~ INC-CNRS %~ CINAM %~ CHIMIE %~ UNIV-MONTPELLIER %~ UM-2015-2021 %~ UM-EPE