Development of flexible polymer lab on chip integrating microelectromagnets for microbeads manipulation
Résumé
A flexible microsystem integrating microelectromagnets adapted for the trapping of magnetic microbeads in a microfluidic channel has been simulated, manufactured and characterized. The fabrication process involves the integration of magnetic actuator in a multilayer SU-8 microsystem using standard electroplating. Numerous designs of micro-inductors including spirals, squares or serpentines wires have been conducted with 5 to 20 coils with cross-section 5*10 μm. These micro-inductors have been simulated by using finite element models in order to optimize the magnetic beads manipulation. We have showed that the design of microelectromagnets is critical. , and that the magnetic field intensity increases 13-fold for square or circular coils with three levels of electrical connections. We have also validate our models by showing that magnetic microbeads can be manipulated in real time using our micro-inductors.