Miniaturization of microwave devices at the nanoscale induces high impedance, posing significant challenges in accurate measurement techniques. In response, this work introduces novel calibration kits tailored specifically for nanoscale applications. We present the design of an on-wafer Thru Reflect Line (TRL) calibration kit, optimized for precise measurements at frequencies up to 110 GHz. The kit accommodates 100−μm pitch ground signal ground (GSG) on-wafer probes. The proposed calibration structures offer enhanced accuracy, addressing the demands of high impedance measurement in miniaturized microwave devices. This work contributes to advancing measurement capabilities in nanoscale microwave engineering, facilitating the development of next-generation high-frequency devices.