NbN waveguide-integrated superconducting nanowire single-photon detectors on 200 mm SOI wafers - Archive ouverte HAL
Communication Dans Un Congrès Année : 2024

NbN waveguide-integrated superconducting nanowire single-photon detectors on 200 mm SOI wafers

Résumé

We demonstrate NbN-based waveguide-integrated superconducting nanowire single photon detectors fabricated on 200 mm SOI wafers using a fully CMOS-compatible process. We achieve 81 % efficiency at 100 Hz dark count rate, 3.2 ns decay time and 200 MHz maximum count rate.
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Dates et versions

hal-04698876 , version 1 (16-09-2024)

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V. Brisson, J. Bleuse, R. Rhazi, J. Faugier-Tovar, J. -M. Gérard, et al.. NbN waveguide-integrated superconducting nanowire single-photon detectors on 200 mm SOI wafers. 49th European Conference on Optical Communications (ECOC 2023), Sep 2023, Hybrid Conference, United Kingdom. pp.1134-1137, ⟨10.1049/icp.2023.2463⟩. ⟨hal-04698876⟩
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