NbN waveguide-integrated superconducting nanowire single-photon detectors on 200 mm SOI wafers
Résumé
We demonstrate NbN-based waveguide-integrated superconducting nanowire single photon detectors fabricated on 200 mm SOI wafers using a fully CMOS-compatible process. We achieve 81 % efficiency at 100 Hz dark count rate, 3.2 ns decay time and 200 MHz maximum count rate.