Comparative analysis of structural characteristics and thermal insulation properties of ZrO2 thin films deposited via chemical and physical vapor phase processes - Archive ouverte HAL
Journal Articles Thin Solid Films Year : 2024

Comparative analysis of structural characteristics and thermal insulation properties of ZrO2 thin films deposited via chemical and physical vapor phase processes

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Materials Engineering Sciences [physics]

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https://cnrs.hal.science/hal-04696340

Submitted on : Friday, September 13, 2024-8:31:41 AM

Last modification on : Saturday, September 14, 2024-3:22:38 AM

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hal-04696340 , version 1 (13-09-2024)

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Alexandre Jaud, Laura Montalban Palmares, Alice Ravaux, Abderrahime Sekkat, Diane Samélor, et al.. Comparative analysis of structural characteristics and thermal insulation properties of ZrO2 thin films deposited via chemical and physical vapor phase processes. Thin Solid Films, 2024, 805, pp.140516. ⟨10.1016/J.TSF.2024.140516⟩. ⟨hal-04696340⟩

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