Characterization of a low-cost microdevice for rarefied gas flows fabricated via maskless lithography - Archive ouverte HAL
Communication Dans Un Congrès Année : 2024

Characterization of a low-cost microdevice for rarefied gas flows fabricated via maskless lithography

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hal-04694304 , version 1 (11-09-2024)

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  • HAL Id : hal-04694304 , version 1

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Nicolas Gaignebet, Marcos Rojas-Cardenas, Stéphane Colin, Simon Raffy, Matthieu Raison, et al.. Characterization of a low-cost microdevice for rarefied gas flows fabricated via maskless lithography. 33rd International Symposium on Rarefied Gas Dynamics, Jul 2024, Göttingen, Germany. ⟨hal-04694304⟩
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