Thin-film blue light-emitting diodes for flexible device operation down to a millimetric radius of curvature
Résumé
We report on the fabrication and characterization of flexible blue thin-film micro-LED grown by MOVPE.
Two approaches are explored to replace laser lift-off for the micro-LED device liberation from the growth substrate:
the release of the micro-LED structures assisted by quasi-van der Waals epitaxy using an interfacial h-Bn layer; and
the sacrificial etching of the growth substrate starting from LED structures on Si(111). We demonstrate the transfer
of micro-LED on a polyimide substrate and their operation down to a millimetric radius of curvature.
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