Challenges of local electrical measurements on cross-sectional devices using Conductive Atomic Force Microscopy (C-AFM) - Archive ouverte HAL
Communication Dans Un Congrès Année : 2024

Challenges of local electrical measurements on cross-sectional devices using Conductive Atomic Force Microscopy (C-AFM)

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hal-04681544 , version 1 (29-08-2024)

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Lisca Da Mattia, J Alvarez, James P. Connolly, Jean-Paul Kleider, Oleksandr Bilousov, et al.. Challenges of local electrical measurements on cross-sectional devices using Conductive Atomic Force Microscopy (C-AFM). E-MRS Spring Meeting, May 2024, Strasbourg, France. ⟨hal-04681544⟩
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