Characterizing the Electrical Properties of (002)-Orientated Aluminum-Nitride Films Synthesized Directly on Single Crystal (100) Si by Reactive Sputtering - Archive ouverte HAL Accéder directement au contenu
Proceedings/Recueil Des Communications Année : 2024
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hal-04659117 , version 1 (22-07-2024)

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Mostafa Keshavarzi, Rajesh Pandiyan, André Dompierre, Simon Loquai, Gabriel Droulers, et al.. Characterizing the Electrical Properties of (002)-Orientated Aluminum-Nitride Films Synthesized Directly on Single Crystal (100) Si by Reactive Sputtering. 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), IEEE, pp.155-158, 2024, ⟨10.1109/PowerMEMS59329.2023.10417472⟩. ⟨hal-04659117⟩
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