Development and optimization of CMOS-compatible AlN-based photonic devices for 1.55 µm applications: fabrication, characterization, and potential for integrated optics - Archive ouverte HAL
Proceedings/Recueil Des Communications Année : 2024

Development and optimization of CMOS-compatible AlN-based photonic devices for 1.55 µm applications: fabrication, characterization, and potential for integrated optics

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Sciences de l'ingénieur [physics]

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https://hal.science/hal-04654882

Soumis le : samedi 20 juillet 2024-13:15:33

Dernière modification le : mardi 30 juillet 2024-20:21:12

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hal-04654882 , version 1 (20-07-2024)

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Redouane Amrar, Guillaume Beaudin, Gabriel Droulers, Simon Loquai, Paul Charette. Development and optimization of CMOS-compatible AlN-based photonic devices for 1.55 µm applications: fabrication, characterization, and potential for integrated optics. Smart Photonic and Optoelectronic Integrated Circuits 2024, SPIE, pp.12, 2024, ⟨10.1117/12.2692237⟩. ⟨hal-04654882⟩

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