Development of hydrogen-selective TiOxNy-Pd composite membrane materials by atomic layer deposition - Archive ouverte HAL
Journal Articles Applied Materials Today Year : 2024

Development of hydrogen-selective TiOxNy-Pd composite membrane materials by atomic layer deposition

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https://hal.science/hal-04648051

Submitted on : Monday, July 15, 2024-12:02:14 PM

Last modification on : Tuesday, October 8, 2024-3:07:16 AM

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hal-04648051 , version 1 (15-07-2024)

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Clémence Badie, Martin Drobek, Anne Julbe, Christophe Charmette, Jim Cartier, et al.. Development of hydrogen-selective TiOxNy-Pd composite membrane materials by atomic layer deposition. Applied Materials Today, 2024, 39, pp.102303. ⟨10.1016/j.apmt.2024.102303⟩. ⟨hal-04648051⟩

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