Flexural Plate Wave Piezoelectric MEMS Pressure Sensor
Résumé
A piezoelectric MEMS pressure sensor that exploits the first antisymmetric vibration mode (A0) of Lamb waves is presented. The 6 mm × 6 mm diaphragm used to sense the applied pressure is composed of a stack of doped silicon (Si) and aluminum nitride (AlN) layers with metal interdigital transducers (IDTs) to generate flexural plate waves (FPWs). The working principle has been validated through 2D finite element analysis within the frequency range 10–15 MHz and experimentally verified. A variable pressure has been applied across the diaphragm while measuring the electrical admittance of a single IDT. Experimental data are in good agreement with simulations showing a frequency shift of the admittance peaks when pressure acts on the MEMS diaphragm. For an applied pressure of 170 Pa, a relative frequency variation of 0.25% has been achieved.
| Origine | Fichiers éditeurs autorisés sur une archive ouverte |
|---|---|
| Licence |