First results of humidity sensors based on CeO2 thick film deposited by a new deposition technique from a suspension of nanoparticles - Archive ouverte HAL
Article Dans Une Revue Microelectronic Engineering Année : 2019

First results of humidity sensors based on CeO2 thick film deposited by a new deposition technique from a suspension of nanoparticles

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Sciences de l'ingénieur [physics]

Yannick Guhel  : Connectez-vous pour contacter le contributeur

https://hal.science/hal-04408083

Soumis le : dimanche 21 janvier 2024-17:59:54

Dernière modification le : mercredi 20 mars 2024-16:20:04

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hal-04408083 , version 1 (21-01-2024)

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T. Toloshniak, Y. Guhel, A. Besq, B. Boudart. First results of humidity sensors based on CeO2 thick film deposited by a new deposition technique from a suspension of nanoparticles. Microelectronic Engineering, 2019, 207, pp.7-14. ⟨10.1016/j.mee.2018.11.013⟩. ⟨hal-04408083⟩

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