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Article Dans Une Revue Microelectronic Engineering Année : 2019

First results of humidity sensors based on CeO2 thick film deposited by a new deposition technique from a suspension of nanoparticles

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hal-04408083 , version 1 (21-01-2024)

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T. Toloshniak, Y. Guhel, A. Besq, B. Boudart. First results of humidity sensors based on CeO2 thick film deposited by a new deposition technique from a suspension of nanoparticles. Microelectronic Engineering, 2019, 207, pp.7-14. ⟨10.1016/j.mee.2018.11.013⟩. ⟨hal-04408083⟩
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