Communication Dans Un Congrès Année : 2018

XPS study of the chemical surface engineering on ultra-thin InAlN layers: Evaluation of thermal stability to oxygen exposure

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hal-04403480 , version 1 (18-01-2024)

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  • HAL Id : hal-04403480 , version 1

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Yoan Bourlier, Muriel Bouttemy, Olivier Patard, Piero Gamara, Stephane Piotrowicz, et al.. XPS study of the chemical surface engineering on ultra-thin InAlN layers: Evaluation of thermal stability to oxygen exposure. ECS meeting, May 2018, Seattle, United States. ⟨hal-04403480⟩
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