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Communication Dans Un Congrès Année : 2020

Soft microelectromechanical systems and artificial muscles based on electronically conducting polymers

Résumé

Electroactive polymers (EAPs) are smart materials capable not only to change their shape and/or size in response to electrical stimulation, but also to generate electrical signal in response to mechanical stimulation. Flexible and lightweight, these materials are considered as promising candidates for the development of soft artificial muscles and soft Micro-Electro-Mechanical Systems (MEMS) to move towards soft electronics. This talk aims first at presenting the fabrication, integration and characterization of air-operating soft microactuators and microsensors based on electronically conductive polymers (ECPs) to obtain efficient devices for further integration into microsystems. Layer stacking method has been reported as efficient process for fabricating ECP based microactuators. In this work, electrodes based on poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) have been employed. By using polar reactive additive based on poly(ethylene oxide) (PEO), electrodes with improved electrical, mechanical and electrochemical properties have been obtained and used to fabricate efficient trilayer microactuators according to a simple and reproducible process. In addition, a process fully compatible with microsystems has been developped. The complete elaboration of the trilayer microdevices will be described including their full integration with electrical connections and subsequent operation on a flexible substrate without any manual handling, allowing the design of microsystems with complex configurations. The resulting microsystems were successfully characterized as microactuators and for the first time as mechanical strain microsensors. Finally, by combining PEDOT:PSS based electrodes with different electrochemical or mechanical properties, we demonstrate that it is possible to develop air-operating linear actuators in a rational approach according to a theoretical model. Best combination of electrodes was used to develop asymmetrical trilayer devices with simple layer stacking process. The resulting devices presented linear actuation with performances in the range of predicted values. Linear strain sensing ability of these devices was also demonstrated.

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Chimie
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Dates et versions

hal-04395534 , version 1 (15-01-2024)

Identifiants

  • HAL Id : hal-04395534 , version 1

Citer

Katlin Rohtlaid, Giao T. M. Nguyen, Caroline Soyer, John Dw Madden, Eric Cattan, et al.. Soft microelectromechanical systems and artificial muscles based on electronically conducting polymers. Electroactive Polymer Actuators and Devices (EAPAD) XXII, Apr 2020, Online, United States. ⟨hal-04395534⟩
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