Spectroscopic ellipsometry, a powerful probe to assess the surface modifications of III-V layers after GD-OES plasma sputtering - Archive ouverte HAL Access content directly
Poster Communications Year : 2019

Spectroscopic ellipsometry, a powerful probe to assess the surface modifications of III-V layers after GD-OES plasma sputtering

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hal-04390082 , version 1 (12-01-2024)

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  • HAL Id : hal-04390082 , version 1

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Solène Béchu, Celine Eypert, Davina Messou, Sofia Gaiaschi, Patrick Chapon, et al.. Spectroscopic ellipsometry, a powerful probe to assess the surface modifications of III-V layers after GD-OES plasma sputtering. JNPV 2019, Dec 2019, Dourdan, France. ⟨hal-04390082⟩
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