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Article Dans Une Revue Materials Today Communications Année : 2024

Electromechanical sensitivity of ZnO thin films at high-pressure regime for SAW strain sensor applications

Résumé

This paper employs Density Functional Theory (DFT) to investigate the influence of high hydrostatic pressure on the piezo-elastic properties of ZnO with a specific focus on its repercussions for Surface Acoustic Wave (SAW) devices. Our findings reveal a significant enhancement in the piezoelectric coefficient d33 under high-pressure conditions, particularly reaching 13.09 pC/N at 8 GPa compared to the unpressurized state. This noteworthy improvement directly contributes to an overall enhancement in the electromechanical coupling coefficients (K2), emphasizing for the first time the potential of high-pressure conditions to positively influence the performance of ZnO/Al2O3 SAW devices. To confirm that, we utilized the Finite Element Method (FEM) to analyze the performance of a Surface Acoustic Wave (SAW) device based on ZnO for both propagating modes, namely Rayleigh and Sezawa, under elevated pressure conditions. We observed an improvement in the electromechanical coupling factor (K2) for the Rayleigh and the Sezawa modes, with enhancements of approximately 23% and 52%, respectively, under an applied pressure of 8 GPa compared to 0 GPa. Furthermore, we found that the Sezawa mode exhibits eight times greater sensitivity to pressure variations compared to the Rayleigh mode. These findings provide designers with a better understanding of the electromechanical responsivity and sensitivity of the ZnO-SAW devices to high level of applied pressure.
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Dates et versions

hal-04372459 , version 1 (04-01-2024)

Identifiants

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Fahima Arab, Fares Kanouni, Rafik Serhane, Yan Pennec. Electromechanical sensitivity of ZnO thin films at high-pressure regime for SAW strain sensor applications. Materials Today Communications, 2024, 38, pp.107719. ⟨10.1016/j.mtcomm.2023.107719⟩. ⟨hal-04372459⟩
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