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Poster De Conférence Année : 2023

Edge detection using deep learning pipelines for TEM and SEM metrology by proposing generic and specific approaches

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hal-04343397 , version 1 (13-12-2023)

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Edgar Loza, Julien Baderot, Marion Grould, Emilie Pery, Frédéric Chausse, et al.. Edge detection using deep learning pipelines for TEM and SEM metrology by proposing generic and specific approaches. Metrology, Inspection, and Process Control XXXVII, Feb 2023, San Jose, United States. SPIE, pp.96, ⟨10.1117/12.2657908⟩. ⟨hal-04343397⟩
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