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Communication Dans Un Congrès Année : 2021

LIPSS formation by picosecond laser irradiation of magnetron sputtered CGO thin films

Résumé

The interaction between ultrashort laser beam pulses with thin films induces the formation of surface micro/nanostructures. These laser-induced periodic surface structures (LIPSS), or ripples, could improve the physico-chemical properties of thin films including their specific surface. In the case of electrochemical cells made of an assembly of thin films, they can further improve the performance of the electrode by increasing the specific contact surface by laser structuring of a wide range of materials which is an increasingly powerful technique for species active at the electrode / electrolyte interface. In this work, a picosecond Nd: YAG laser operating at its third harmonic (λ=355 nm) is used to irradiate the surface of gadolinium-doped ceria (CGO) thin films, grown by on yttria-stabilized zirconia (YSZ) by magnetron sputtering. The morphological characteristics of the thin films and their structuring were observed by high resolution scanning electron microscopy (HR-SEM). LIPSS are generally produced in a low fluence laser multi-pulse regime close to the ablation threshold. They were obtained with the period of approximately 283 nm under appropriate values of laser fluence (F from 184 to 295 mJ/cm2) and scanning speed (0.2 mm/s to 0.4 mm/s). Exceeding the threshold leads to surface ablation. In agreement with the literature, it has been noted that these periodic structures can be classified as Low Spatial Frequency LIPSS (LSFL) or High Spatial Frequency LIPSS (HSFL). The LSFL period is generally close to the beam wavelength λ, presenting a period varying in 0.5λ-λ. On the other hand, HSFL refers to ripples having a period smaller than the beam wavelength (< 0.5λ). Our work focusses on the optimization of laser parameters to generate clear and high resolution LSFL/HSFL without ablating the CGO layer. Using numerical tools for SEM/AFM images, the enhancement of the specific surface of the CGO films will also be discussed.
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Dates et versions

hal-04321379 , version 1 (04-12-2023)

Identifiants

  • HAL Id : hal-04321379 , version 1

Citer

Wael Karim, Martin Mickan, Agnès Petit, Malek Tabbal, Anne Lise Thomann, et al.. LIPSS formation by picosecond laser irradiation of magnetron sputtered CGO thin films. Plathinium 2021, Société Française du Vide (SFV), Sep 2021, Virtual conference, France. ⟨hal-04321379⟩
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