3D interconnects for III-V semiconductor heterostructures for miniaturized power devices
Mathieu de Lafontaine
(1, 2)
,
Thomas Bidaud
(1, 2)
,
Guillaume Gay
(3)
,
Erwine Pargon
(3)
,
Camille Petit-Etienne
(3)
,
Artur Turala
(1, 2)
,
Romain Stricher
(1, 2)
,
Serge Ecoffey
(1, 2)
,
Maïté Volatier
(1, 2)
,
Abdelatif Jaouad
(1, 2)
,
Christopher Valdivia
(4)
,
Karin Hinzer
(4)
,
Simon Fafard
(1, 2)
,
Vincent Aimez
(1, 2)
,
Maxime Darnon
(1, 2)