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Article Dans Une Revue Applied Surface Science Année : 2023

Assessing advanced methods in XPS and HAXPES for determining the thicknesses of high-k oxide materials: From ultra-thin layers to deeply buried interfaces

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hal-04302795 , version 1 (23-11-2023)

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T.R. Bure, O. Renault, E. Nolot, T. Lardin, Christine Robert-Goumet, et al.. Assessing advanced methods in XPS and HAXPES for determining the thicknesses of high-k oxide materials: From ultra-thin layers to deeply buried interfaces. Applied Surface Science, 2023, 609, pp.155317. ⟨10.1016/j.apsusc.2022.155317⟩. ⟨hal-04302795⟩
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