Technology and design study of a 3D physics-basedinductor on a FDSOI CMOS technology for quantum and RF applications - Archive ouverte HAL
Communication Dans Un Congrès Année : 2023
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hal-04298973 , version 1 (21-11-2023)

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  • HAL Id : hal-04298973 , version 1

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Franck Sabatier, Cédric Durand, Dominique Drouin, Michel Pioro-Ladrière, Fabien Ndagijiman, et al.. Technology and design study of a 3D physics-basedinductor on a FDSOI CMOS technology for quantum and RF applications. EUROSOI-ULIS 2023, May 2023, Tarragona, Spain. ⟨hal-04298973⟩
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