Local Kinetic Modeling of Aluminum Oxide Metal-Organic CVD From Aluminum Tri-isopropoxide
Résumé
Due to numerous allotropic modifications and to the subsequent large spectrum of structure-properties relationships,aluminum oxides in the form of films and coatings are of major technological interest for a wide range of applications, e.g., optics and microelectronic components,wear resistance, catalyst support, protection against corrosion,and high temperature oxidation. Metal-organic(MO)CVD is a potentially attractive technique for the processing of such coatings, especially on complex-in-shape, temperature-sensitive parts.
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