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Communication Dans Un Congrès Année : 2023

Automated and Robotic On-Wafer Probing Station

Résumé

Emergent microwave and millimetre-wave technologies call for new and more accurate characterization techniques. In particular, repeatability of on-wafer calibration and measurements methods must be addressed. In this work, we are presenting the hardware and software development of a new nanorobotics on-wafer probing station designed and optimized for on-wafer probing using ground-signal-ground (GSG) probes. Automated calibration considering 1-port configuration is exemplary demonstrated.
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Dates et versions

hal-04268605 , version 1 (02-11-2023)

Identifiants

Citer

Cerine Mokhtari, Clément Lenoir, Mohamed Sebbache, Kamel Haddadi. Automated and Robotic On-Wafer Probing Station. 2023 IEEE Symposium on Wireless Technology & Applications (ISWTA), Aug 2023, Kuala Lumpur, Malaysia. pp.99-102, ⟨10.1109/ISWTA58588.2023.10249964⟩. ⟨hal-04268605⟩
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