Generation of high-aspect ratio, dense nano-plasmas in solid dielectrics with femtosecond Bessel
Résumé
Transparent materials such as glass and sapphire are ubiq-uitous in modern technology. They are used for consumer electronics, substrates for microsystems, microchips, and encapsulation. However, most of the intended uses require deep drilling, which is extremely demanding for lithogra-phy. In this framework, ultrafast laser pulses are ideal since they allow materials to be processed in 3 dimensions from the material’s bulk. In this context, Bessel beams provide novel opportunities for laser processing of transparent ma-terials at an extremely high aspect ratio.
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