Fabrication of c-axis LiNbO3 Thin Film for Surface Acoustic Wave Applications
Résumé
Lithium niobate (LN) is an important dielectric and ferroelectric materials, which are widely used in acoustics, optic, and optoelectrical devices. In this study, LN thin film was deposited by CBVD method. A SAW delay line and a one-port resonator were fabricated by an e-beam lithography process to investigate the acoustic properties.
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