Pulsed aerosol-assisted plasma processes for (multi)functional thin film deposition
Résumé
Pulsed aerosol injection is an appealing method to inject complex precursors in plasmas independently on their composition and thermodynamic characteristics. This method is implementable to form (multi)functional thin films in various plasma processes by pulse injecting colloidal solutions or by using a pulsed direct liquid reactor-injector of nanoparticles. However, the pulsed injection introduces new specific physics.
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