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Article Dans Une Revue AIP Advances Année : 2017

Soft nanoimprint lithography on SiO2 sol-gel to elaborate sensitive substrates for SERS detection

Résumé

This paper presents a new alternative fabrication of biochemical sensor based on surface enhanced Raman scattering (SERS) by soft nanoimprint lithography (S-NIL) on SiO2 sol-gel. Stabilization of the sol-gel film is obtained by annealing which simplifies the manufacturing of these biosensors and is compatible with mass production at low cost. This detector relies on a specific pattern of gold nanodisks on a thin gold film to obtain a better sensitivity of molecules’ detection. Characterizations of SERS devices were performed on a confocal Raman microspectrophotometer after a chemical functionalization. We report a lateral collapse effect on poly(diméthylsiloxane) (PDMS) stamp for specific nanostructure dimensions. This unintentional effect is used to evaluate S-NIL resolution in SiO2 sol-gel.
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Dates et versions

hal-04228383 , version 1 (04-10-2023)

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Frédéric Hamouda, Jean-François Bryche, Abdelhanin Aassime, Emmanuel Maillart, Valentin Gâté, et al.. Soft nanoimprint lithography on SiO2 sol-gel to elaborate sensitive substrates for SERS detection. AIP Advances, 2017, 7 (12), pp.125125. ⟨10.1063/1.5004122⟩. ⟨hal-04228383⟩
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