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            <funder>This work was supported partially by the Direction Générale de l’Armement (DGA) and by the Agence Nationale de la Recherche (ANR) in the frame of the ASTRID project named PULSACION under Grant ANR-19-ASTR-0013-01 as well as by the Région Franche-Comté (NOUGE-CELL project). It was also supported by the Agence Nationale de la Recherche (ANR) in the frame of the LabeX FIRST-TF (Grant ANR 10-LABX-48-01), the EquipX Oscillator IMP (Grant ANR 11-EQPX-0033) and the EIPHI Graduate school (Grant ANR-17-EURE-0002). The work of Clément Carlé was funded by the Centre National d’Etudes Spatiales (CNES) and the Agence Innovation Défense (AID) and the one of Petri Karvinen by the Photonics Research and Innovation (PREIN) Programme of the Academy of Finland, decision 320166.</funder>
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              <p>The stability and accuracy of atomic devices can be degraded by theevolution of their cell inner atmosphere. Hence,&lt;br /&amp;gtthe undesired entrance or leakage of background or buffer gas,respectively, that can permeate through the cell walls,&lt;br /&amp;gtshould be slowed down. In this work, we investigate heliumpermeation in microfabricated alkali vapor cells filled&lt;br /&amp;gtwith He and whose windows are made of borosilicate glass (BSG) oraluminosilicate glass (ASG). The permeation is&lt;br /&amp;gtthen derived from routine measurements of the pressure-shiftedhyperfine transition frequency of an atomic clock. We&lt;br /&amp;gtfirst confirm that ASG reduces He permeation rate by more than twoorders of magnitude, in comparison with BSG.&lt;br /&amp;gtIn addition, we demonstrate that Al2O3 thin-film coatings, known toavoid alkali consumption in vapor cells, can also&lt;br /&amp;gtsignificantly reduce He permeation. The permeation through BSG isthereby reduced by a factor 110 whereas the one&lt;br /&amp;gtthrough ASG is decreased by a factor up to 5.8 compared to uncoatedsubstrates. These results may contribute to the&lt;br /&amp;gtdevelopment of miniaturized atomic clocks and sensors with improvedlong-term stability or sensitivity.</p>
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