Reduction of helium permeation in microfabricated cells using aluminosilicate glass substrates and Al2O3 coatings
Abstract
The stability and accuracy of atomic devices can be degraded by the
evolution of their cell inner atmosphere. Hence,
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https://hal.science/hal-04224507
Submitted on : Monday, October 2, 2023-10:09:07 AM
Last modification on : Monday, October 21, 2024-1:00:12 PM
Long-term archiving on : Wednesday, January 3, 2024-6:34:55 PM
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- HAL Id : hal-04224507 , version 1
- ARXIV : 2303.13927
- DOI : 10.1063/5.0151899
Cite
Clément Carlé, Shervin Keshavarzi, Andrei Mursa, Petri Karvinen, Ravinder Kumar Chutani, et al.. Reduction of helium permeation in microfabricated cells using aluminosilicate glass substrates and Al2O3 coatings. Journal of Applied Physics, 2023, 133, pp.214501 (7). ⟨10.1063/5.0151899⟩. ⟨hal-04224507⟩
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