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Communication Dans Un Congrès Année : 2023

Supercontinuum generation in ICP-CVD silicon-rich silicon nitride waveguides

Résumé

Inductively coupled plasma chemical vapor deposition was used to obtain thin films of siliconrich silicon nitride with a refractive index of 2.44 at optical telecommunications wavelength. The resulting layer was patterned into a 1.6 μm wide waveguide and tested for its nonlinear behavior using a 90-fs all-fiber laser centered at 1630 nm. A significant spectral broadening is demonstrated with a supercontinuum generation from 1300 nm to 1985 nm. Simulations are in fair agreement with the experiments, assuming a nonlinear index of 2 x 10-18 m2/W.
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hal-04185214 , version 1 (20-10-2023)

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Ayesha Jayantha, Aurore Andrieux, Isabelle Gallet, Christophe Finot, Kamal Hammani. Supercontinuum generation in ICP-CVD silicon-rich silicon nitride waveguides. European Optical Society Annual Meeting, EOSAM 2023, Sep 2023, Dijon, France. pp.01001, ⟨10.1051/epjconf/202328701001⟩. ⟨hal-04185214⟩
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