Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001) - Archive ouverte HAL
Autre Publication Scientifique Journal of Micromechanics and Microengineering Année : 2023

Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)

Résumé

This corrigendum reformulates the equations for the normal contact force of the probe and the condition for tip skate in the presence of friction. This enables a formulation of the effective spring constant of a tilted probe to be written down. This model is compared to that of others.

Domaines

Physique [physics] Sciences de l'ingénieur [physics]

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https://hal.science/hal-04182123

Soumis le : jeudi 17 août 2023-09:16:21

Dernière modification le : mardi 4 juin 2024-13:26:03

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Dates et versions

hal-04182123 , version 1 (17-08-2023)

Identifiants

Citer

Steve Arscott. Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001). 2023, pp.099501. ⟨10.1088/1361-6439/ace834⟩. ⟨hal-04182123⟩

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