<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-04174247</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-14T09:38:31+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Study of mechanical properties of metal-ceramic multilayers</title>
            <title xml:lang="fr">Etude des propriétés mécaniques des multicouches métal/céramique</title>
            <author role="aut">
              <persName>
                <forename type="first">M.</forename>
                <surname>Ben Daia</surname>
              </persName>
              <idno type="halauthorid">2872325-0</idno>
              <affiliation ref="#struct-1160797"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">S.</forename>
                <surname>Labdi</surname>
              </persName>
              <email type="md5">2e355a1b91fd2900bd35f83f7e4f5590</email>
              <email type="domain">univ-evry.fr</email>
              <idno type="idhal" notation="string">sid-labdi</idno>
              <idno type="idhal" notation="numeric">176077</idno>
              <idno type="halauthorid" notation="string">7315-176077</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-4247-0206</idno>
              <idno type="GOOGLE SCHOLAR">https://scholar.google.fr/citations?user=gn7ka0IAAAAJ&amp;hl=fr</idno>
              <idno type="IDREF">https://www.idref.fr/070753431</idno>
              <idno type="VIAF">https://viaf.org/viaf/216093873</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/G-3265-2011</idno>
              <affiliation ref="#struct-1160797"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">P.</forename>
                <surname>Aubert</surname>
              </persName>
              <idno type="halauthorid">110220-0</idno>
              <affiliation ref="#struct-1160797"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">C.</forename>
                <surname>Sant</surname>
              </persName>
              <idno type="halauthorid">104634-0</idno>
              <affiliation ref="#struct-1160797"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Sid</forename>
                <surname>Labdi</surname>
              </persName>
              <email type="md5">2e355a1b91fd2900bd35f83f7e4f5590</email>
              <email type="domain">univ-evry.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2023-07-31 15:53:52</date>
              <date type="whenModified">2025-04-17 09:48:14</date>
              <date type="whenReleased">2023-07-31 15:53:52</date>
              <date type="whenProduced">2001</date>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="550602">
                <persName>
                  <forename>Sid</forename>
                  <surname>Labdi</surname>
                </persName>
                <email type="md5">2e355a1b91fd2900bd35f83f7e4f5590</email>
                <email type="domain">univ-evry.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-04174247</idno>
            <idno type="halUri">https://hal.science/hal-04174247</idno>
            <idno type="halBibtex">bendaia:hal-04174247</idno>
            <idno type="halRefHtml">&lt;i&gt;Vide-Science, Technique et Applications&lt;/i&gt;, 2001, 34 (301), pp.540+611-625</idno>
            <idno type="halRef">Vide-Science, Technique et Applications, 2001, 34 (301), pp.540+611-625</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-EVRY">Université d'Evry-Val d'Essonne</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Study of mechanical properties of metal-ceramic multilayers</title>
                <title xml:lang="fr">Etude des propriétés mécaniques des multicouches métal/céramique</title>
                <author role="aut">
                  <persName>
                    <forename type="first">M.</forename>
                    <surname>Ben Daia</surname>
                  </persName>
                  <idno type="halauthorid">2872325-0</idno>
                  <affiliation ref="#struct-1160797"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">S.</forename>
                    <surname>Labdi</surname>
                  </persName>
                  <email type="md5">2e355a1b91fd2900bd35f83f7e4f5590</email>
                  <email type="domain">univ-evry.fr</email>
                  <idno type="idhal" notation="string">sid-labdi</idno>
                  <idno type="idhal" notation="numeric">176077</idno>
                  <idno type="halauthorid" notation="string">7315-176077</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-4247-0206</idno>
                  <idno type="GOOGLE SCHOLAR">https://scholar.google.fr/citations?user=gn7ka0IAAAAJ&amp;hl=fr</idno>
                  <idno type="IDREF">https://www.idref.fr/070753431</idno>
                  <idno type="VIAF">https://viaf.org/viaf/216093873</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/G-3265-2011</idno>
                  <affiliation ref="#struct-1160797"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">P.</forename>
                    <surname>Aubert</surname>
                  </persName>
                  <idno type="halauthorid">110220-0</idno>
                  <affiliation ref="#struct-1160797"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">C.</forename>
                    <surname>Sant</surname>
                  </persName>
                  <idno type="halauthorid">104634-0</idno>
                  <affiliation ref="#struct-1160797"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="INCOMING">592533</idno>
                <idno type="issn">1266-0167</idno>
                <title level="j">Vide-Science, Technique et Applications</title>
                <imprint>
                  <publisher>Elsevier Science B.V.</publisher>
                  <biblScope unit="volume">34</biblScope>
                  <biblScope unit="issue">301</biblScope>
                  <biblScope unit="pp">540+611-625</biblScope>
                  <date type="datePub">2001</date>
                </imprint>
              </monogr>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="fr">French</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">microstructure</term>
                <term xml:lang="en">hardness</term>
                <term xml:lang="en">nanoindentation</term>
                <term xml:lang="en">sputtering</term>
                <term xml:lang="en">multilayers</term>
              </keywords>
              <classCode scheme="halDomain" n="phys">Physics [physics]</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>Multilayers of alternative metal and ceramic (nitrid) present attractive tribological properties. The aim of this study is to correlate the hardness with the structural properties.Multilayers films of Ti-TiN with a period thickness equal 20,10,8,5 and 2.5 nm, were deposited by RF reactive sputtering on silicon substrates with a metallic target. The deposition was done at room temperature for T-TiN.The total and period thickness for all the films, were measured by Grazing X-Ray Reflectometry. The hardness was measured by nanoindention with a Berkovich diamond indentor. For T-TiN the hardness increases with decreasing period thickness to go beyond the rule-of-mixture value for samples with period thickness Lambda less than or equal to 5 nm. The maximum hardness, 1.6 times higher than the rule of mixture value, is obtained for Lambda = 2.5 nm. However a similar tribological behavior was obtain for these two systems. Wear resistance increases when the period thickness decrease and shows a maximun value for the smallest A, superior to those of monolithic layers TiN and Al2O3.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-1160797" status="OLD">
          <orgName>Laboratoire d'étude des milieux nanométriques</orgName>
          <orgName type="acronym">LEMN</orgName>
          <date type="start">1995-01-01</date>
          <date type="end">2013-12-31</date>
          <desc>
            <address>
              <addrLine>Bâtiment Maupertuis, Rue du Père Jarlan, 91025 Evry Cedex</addrLine>
              <country key="FR"/>
            </address>
          </desc>
          <listRelation>
            <relation active="#struct-300306" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-300306" status="VALID">
          <idno type="IdRef">030820529</idno>
          <idno type="ISNI">0000000121805818</idno>
          <idno type="ROR">https://ror.org/00e96v939</idno>
          <idno type="Wikidata">Q1531014</idno>
          <orgName>Université d'Évry-Val-d'Essonne</orgName>
          <orgName type="acronym">UEVE</orgName>
          <date type="start">1991-07-22</date>
          <desc>
            <address>
              <addrLine>Boulevard François Mitterrand 91025 Evry Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-evry.fr</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>