Nanostructuring of 4H-SiC by high temperature annealing
Nanostructuration du 4H-SiC par recuit haute température
Résumé
Nanostructuring of the surface occurs after annealing at high temperature of 4H-SiC samples. The surface morphology becomes needle-shaped like black silicon. The roughness of the surface also increases due to annealing and a slight etching of nanostructured zones occurs with an accentuated phenomenon at the boundaries. Electroluminescence is obtained by applying forward bias on fabricated PIN diode structures with localized nanostructured windows on the surface. Light intensity seems to be more sensitive to the initial orientation of the substrate and less to the annealing temperature in the 1500°C-1700°C range.
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