<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-04112708v2</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-15T08:59:01+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">GHG emissions of semiconductor manufacturing in 2021</title>
            <author role="aut">
              <persName>
                <forename type="first">Maxime</forename>
                <surname>Pelcat</surname>
              </persName>
              <email type="md5">4ffc40628251a21f47ae77a0a1f461ba</email>
              <email type="domain">insa-rennes.fr</email>
              <idno type="idhal" notation="string">mpelcat</idno>
              <idno type="idhal" notation="numeric">15780</idno>
              <idno type="halauthorid" notation="string">5373-15780</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-1158-0915</idno>
              <idno type="IDREF">https://www.idref.fr/148709060</idno>
              <affiliation ref="#struct-117606"/>
              <affiliation ref="#struct-105160"/>
              <affiliation ref="#struct-1089025"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Maxime</forename>
                <surname>Pelcat</surname>
              </persName>
              <email type="md5">4ffc40628251a21f47ae77a0a1f461ba</email>
              <email type="domain">insa-rennes.fr</email>
            </editor>
            <funder ref="#projanr-90731"/>
          </titleStmt>
          <editionStmt>
            <edition n="v1">
              <date type="whenSubmitted">2023-06-05 17:05:19</date>
            </edition>
            <edition n="v2" type="current">
              <date type="whenSubmitted">2023-07-17 13:54:29</date>
              <date type="whenModified">2025-04-10 16:24:16</date>
              <date type="whenReleased">2023-07-25 11:50:21</date>
              <date type="whenProduced">2023-06-01</date>
              <date type="whenEndEmbargoed">2023-07-17</date>
              <ref type="file" target="https://hal.science/hal-04112708v2/document">
                <date notBefore="2023-07-17"/>
              </ref>
              <ref type="file" subtype="author" n="1" target="https://hal.science/hal-04112708v2/file/semiconductor_ghg.pdf" id="file-4163428-3625493">
                <date notBefore="2023-07-17"/>
              </ref>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="144915">
                <persName>
                  <forename>Maxime</forename>
                  <surname>Pelcat</surname>
                </persName>
                <email type="md5">4ffc40628251a21f47ae77a0a1f461ba</email>
                <email type="domain">insa-rennes.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-04112708</idno>
            <idno type="halUri">https://hal.science/hal-04112708</idno>
            <idno type="halBibtex">pelcat:hal-04112708</idno>
            <idno type="halRefHtml">Univ Rennes, INSA Rennes, CNRS, IETR – UMR 6164, F-35000 Rennes. 2023</idno>
            <idno type="halRef">Univ Rennes, INSA Rennes, CNRS, IETR – UMR 6164, F-35000 Rennes. 2023</idno>
            <availability status="restricted">
              <licence target="https://about.hal.science/hal-authorisation-v1/">HAL Authorization<ref corresp="#file-4163428-3625493"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-RENNES1">Université de Rennes 1</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="INSA-RENNES">Institut National des Sciences Appliquées de Rennes</idno>
            <idno type="stamp" n="IETR">Institut d'Électronique et des Technologies du numéRique - UMR CNRS 6164</idno>
            <idno type="stamp" n="IETR-INSA" corresp="IETR">Institut d'Electronique et de Télécommunications de Rennes</idno>
            <idno type="stamp" n="CENTRALESUPELEC">Ecole CentraleSupélec</idno>
            <idno type="stamp" n="UR1-HAL">Publications labos UR1 dans HAL-Rennes 1</idno>
            <idno type="stamp" n="LARA">LARA</idno>
            <idno type="stamp" n="UR1-MATH-STIC">UR1 - publications Maths-STIC</idno>
            <idno type="stamp" n="UR1-UFR-ISTIC">UFR ISTIC Informatique et électronique</idno>
            <idno type="stamp" n="IETR-VAADER" corresp="IETR">Video Analysis and Architecture Design for Embedded Resources</idno>
            <idno type="stamp" n="IETR-IMAGE">IETR - Département Image</idno>
            <idno type="stamp" n="TEST-UR-CSS">TEST Université de Rennes CSS</idno>
            <idno type="stamp" n="UNIV-RENNES">Université de Rennes</idno>
            <idno type="stamp" n="INSA-GROUPE">Groupe INSA</idno>
            <idno type="stamp" n="ANR">ANR</idno>
            <idno type="stamp" n="UR1-MATH-NUM">Pôle UnivRennes - Mathématiques - Numérique </idno>
            <idno type="stamp" n="CYBERSCHOOL">CyberSchool - Ecole universitaire de recherche en Cybersécurité</idno>
            <idno type="stamp" n="NANTES-UNIVERSITE">Nantes Université</idno>
            <idno type="stamp" n="NANTES-UNIV">Nantes Université</idno>
          </seriesStmt>
          <notesStmt/>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">GHG emissions of semiconductor manufacturing in 2021</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Maxime</forename>
                    <surname>Pelcat</surname>
                  </persName>
                  <email type="md5">4ffc40628251a21f47ae77a0a1f461ba</email>
                  <email type="domain">insa-rennes.fr</email>
                  <idno type="idhal" notation="string">mpelcat</idno>
                  <idno type="idhal" notation="numeric">15780</idno>
                  <idno type="halauthorid" notation="string">5373-15780</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-1158-0915</idno>
                  <idno type="IDREF">https://www.idref.fr/148709060</idno>
                  <affiliation ref="#struct-117606"/>
                  <affiliation ref="#struct-105160"/>
                  <affiliation ref="#struct-1089025"/>
                </author>
              </analytic>
              <monogr>
                <imprint>
                  <date type="datePub">2023-06-01</date>
                </imprint>
                <authority type="institution">Univ Rennes, INSA Rennes, CNRS, IETR – UMR 6164, F-35000 Rennes</authority>
              </monogr>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">sustainability</term>
                <term xml:lang="en">integrated circuit (IC)</term>
                <term xml:lang="en">semiconductor</term>
                <term xml:lang="en">carbon footprint</term>
                <term xml:lang="en">greenhouse gas emissions</term>
              </keywords>
              <classCode scheme="halDomain" n="info.info-ce">Computer Science [cs]/Computational Engineering, Finance, and Science [cs.CE]</classCode>
              <classCode scheme="halTypology" n="REPORT">Reports</classCode>
              <classCode scheme="halOldTypology" n="REPORT">Reports</classCode>
              <classCode scheme="halTreeTypology" n="REPORT.RESREPORT">Reports - Research report</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>The greenhouse gas (GHG) emissions of semiconductor manufacturing represent an important share of the embodied carbon footprint of electronics systems. Manufacturing emissions are disclosed in the sustainability reports of semiconductor companies. This paper proposes a study of global semiconductor manufacturing carbon emissions, focusing on Scope 1 (direct emissions) and Scope 2 (emissions induced by consuming energy). The fifteen companies on the semiconductor market with highest 2021 revenues are considered, as well as the four main merchant foundries, over the years 2020 and 2021. As a large scale evaluation of carbon impacts, the resulting numbers compile heterogeneous figures and require a comprehensive discussion on the strengths and limitations of the evaluation. Most of the efforts on this paper are thus allocated to this discussion. The 2021 carbon emissions for the semiconductor industry worldwide are estimated at 76.5M tons of CO2 equivalent, breaking down into 30.6M tons CO2e of Scope 1 emissions (direct emissions), and 45.9M tons CO2e of scope 2 emissions (emissions induced by the energy consumption of manufacturing). These numbers do not include the Scope 3 impacts, neither downwards (usage of the products) nor upwards (constructing fabrication facilities, building fabrication machines, extracting raw materials, smelting and refining materials). Between 2020 and 2021, Scope 1&amp;2 emissions of semiconductor manufacturing have increased by 13%.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="institution" xml:id="struct-117606" status="VALID">
          <idno type="ROR">https://ror.org/04xaa4j22</idno>
          <orgName>Institut National des Sciences Appliquées - Rennes</orgName>
          <orgName type="acronym">INSA Rennes</orgName>
          <desc>
            <address>
              <addrLine>20, avenue des Buttes de Coësmes - CS 70839 - 35708 Rennes cedex 7</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.insa-rennes.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-301232" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-105160" status="VALID">
          <idno type="IdRef">26693823X</idno>
          <idno type="ROR">https://ror.org/015m7wh34</idno>
          <orgName>Université de Rennes</orgName>
          <orgName type="acronym">UR</orgName>
          <desc>
            <address>
              <addrLine>Campus de Beaulieu, 263 avenue Général Leclerc, CS 74205, 35042 RENNES CEDEX</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.univ-rennes.fr/</ref>
          </desc>
        </org>
        <org type="laboratory" xml:id="struct-1089025" status="VALID">
          <idno type="IdRef">149256035</idno>
          <idno type="RNSR">200212224H</idno>
          <idno type="ROR">https://ror.org/013q33h79</idno>
          <orgName>Institut d'Électronique et des Technologies du numéRique</orgName>
          <orgName type="acronym">IETR</orgName>
          <date type="start">2022-01-01</date>
          <desc>
            <address>
              <addrLine>Campus de Beaulieu Bâtiment 11D 263 Av.Général Leclerc-CS 74205 35042 Rennes Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.ietr.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-105160" type="direct"/>
            <relation active="#struct-117606" type="direct"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-411575" type="direct"/>
            <relation name="UMR6164" active="#struct-441569" type="direct"/>
            <relation active="#struct-1088614" type="direct"/>
            <relation active="#struct-1083400" type="indirect"/>
            <relation active="#struct-1083366" type="indirect"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-301232" status="VALID">
          <idno type="IdRef">162105150</idno>
          <orgName>Institut National des Sciences Appliquées</orgName>
          <orgName type="acronym">INSA</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="institution" xml:id="struct-411575" status="VALID">
          <idno type="IdRef">184443237</idno>
          <idno type="ROR">https://ror.org/019tcpt25</idno>
          <orgName>CentraleSupélec</orgName>
          <desc>
            <address>
              <addrLine>3, rue Joliot Curie,Plateau de Moulon,91192 GIF-SUR-YVETTE Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.centralesupelec.fr</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="regrouplaboratory" xml:id="struct-1088614" status="VALID">
          <idno type="IdRef">068449399</idno>
          <orgName>Nantes Université - Ecole Polytechnique de l'Université de Nantes</orgName>
          <orgName type="acronym">Nantes Univ - EPUN</orgName>
          <date type="start">2022-01-01</date>
          <desc>
            <address>
              <addrLine>Campus Chantrerie : Rue Christian Pauc - CS 50609 - 44306 Nantes Cedex 3Campus Gavy : Gavy Océanis -  CS 70152 - 44603 Saint-Nazaire CedexCampus Courtaisière : 18 Boulevard Gaston Defferre - 85035 La Roche-sur-Yon Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://web.polytech.univ-nantes.fr/l-ecole/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-1083400" type="direct"/>
            <relation active="#struct-1083366" type="indirect"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-1083400" status="VALID">
          <orgName>Nantes Université - pôle Sciences et technologie</orgName>
          <date type="start">2022-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://nouvelleuniversite.univ-nantes.fr/les-poles</ref>
          </desc>
          <listRelation>
            <relation active="#struct-1083366" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-1083366" status="VALID">
          <idno type="IdRef">258086599</idno>
          <idno type="ROR">https://ror.org/03gnr7b55</idno>
          <orgName>Nantes Université</orgName>
          <orgName type="acronym">Nantes Univ</orgName>
          <date type="start">2022-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
      </listOrg>
      <listOrg type="projects">
        <org type="anrProject" xml:id="projanr-90731" status="VALID">
          <idno type="anr">ANR-23-CMAS-0007</idno>
          <orgName>ESOS</orgName>
          <desc>Electronique Soutenable, Ouverte et Souveraine (ESOS)</desc>
          <date type="start">2023</date>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>