Direct Liquid Reactor-Injector of Nanoparticles: A Safer-by-Design Aerosol Injection for Nanocomposite Thin-Film Deposition Adapted to Various Plasma-Assisted Processes - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Coatings Année : 2023

Direct Liquid Reactor-Injector of Nanoparticles: A Safer-by-Design Aerosol Injection for Nanocomposite Thin-Film Deposition Adapted to Various Plasma-Assisted Processes

Marjorie Cavarroc
Andranik Sarkissian
Myrtil Louise Kahn
Luc Stafford

Résumé

The requirements of nanocomposite thin films, having non-aggregated nanoparticles homogeneously dispersed in the matrix, have been realized using a new method of Direct Liquid Reactor-Injector (DLRI) of nanoparticles. In this approach, unlike conventional aerosol-assisted plasma deposition, the nanoparticles are synthesized before their injection as an aerosol into plasma. In our experiments, we have used two different plasma reactors, namely an asymmetric low-pressure RF plasma reactor and a parallel plate dielectric barrier discharge at atmospheric pressure. Our results have shown that DLRI can be easily coupled with various plasma processes as this approach allows the deposition of high-quality multifunctional nanocomposite thin films, with embedded nanoparticles of less than 10 nm in diameter. Hence, DLRI coupled with plasma processes meets the specifications for the deposition of multifunctional coatings.
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Dates et versions

hal-04065604 , version 1 (13-04-2023)

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Paternité

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Guillaume Carnide, Laura Cacot, Yohan Champouret, Vincent Pozsgay, Thomas Verdier, et al.. Direct Liquid Reactor-Injector of Nanoparticles: A Safer-by-Design Aerosol Injection for Nanocomposite Thin-Film Deposition Adapted to Various Plasma-Assisted Processes. Coatings, 2023, 13 (3), pp.630. ⟨10.3390/coatings13030630⟩. ⟨hal-04065604⟩
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