Communication Dans Un Congrès Année : 2012

Temperature and polarization dependence of growth processes of Zirconium metal-organic layers deposited by MMP-DECR reactor using zirconium tert-butoxide/O2 mixture

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hal-03988742 , version 1 (14-02-2023)

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  • HAL Id : hal-03988742 , version 1

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Rick Verhoef, Raphael Cozzolino, Patrice Raynaud. Temperature and polarization dependence of growth processes of Zirconium metal-organic layers deposited by MMP-DECR reactor using zirconium tert-butoxide/O2 mixture. PSE 2012 : 13th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, GERMANY, 2012, Garmisch-Partenkirchen, Germany. ⟨hal-03988742⟩
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