MAGNETIC CHARACTERIZATION OF POROUS SILICON – COBALT NANOPARTICLE COMPOSITE FOR RF DEVICE APPLICATION
Résumé
We describe the preparation of porous silicon (PS) films functionalized with magnetic cobalt nanoparticles (NPs) for microelectronic device RF applications. The addition of magnetic NPs to the PS layer is expected to limit the electrical losses
of the RF inductors and therefore increase their performances. After PS formation, cobalt NPs were incorporated into the
PS layer by electrochemical deposition. Different deposition conditions were experimented and the magnetic behavior of
the PS films - Co NPs composite was characterized by VSM (Vibrating Sample Magnetometer).