Communication Dans Un Congrès Année : 2007
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hal-03977095 , version 1 (07-02-2023)

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  • HAL Id : hal-03977095 , version 1

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Françoise F. Massines, Thierry Paulmier, Isabelle Savin De Larclause, Nicolas Gherardi, Richard Clergereaux, et al.. Plasma-enhanced deposition of polymer-like silicon based coatings produced from Hexamethyldisiloxane at low and atmospheric pressure. CIP 2007: 16th International Colloquium on Plasma Processes, Toulouse, France, 2007, Toulouse, France. ⟨hal-03977095⟩
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