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Article Dans Une Revue Micro and Nano Letters Année : 2010

Variable RF MEMS fluidic inductor incorporating lamination process

Variable RF MEMS fluidic inductor incorporating lamination process

Résumé

A variable inductor based on liquid tuning has been fabricated and characterised. The fabrication process used SU-8 channel obtained by spin coating and lamination. A 107% tuning range with high inductance from 5.4 to 2.6 nH is achieved. With no actuation, the peak quality factor is 12, and the self-resonance frequency is 4 GHz.
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Dates et versions

hal-03977048 , version 1 (07-02-2023)

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I. El Gmati, P. Calmon, R. Fulcrand, Patrick Pons, A. Boukabache, et al.. Variable RF MEMS fluidic inductor incorporating lamination process. Micro and Nano Letters, 2010, 5 (6), pp.1380-1383. ⟨10.1049/mnl.2010.0131⟩. ⟨hal-03977048⟩
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