Variable RF MEMS fluidic inductor incorporating lamination process
Variable RF MEMS fluidic inductor incorporating lamination process
Résumé
A variable inductor based on liquid tuning has been fabricated and characterised. The fabrication process used SU-8 channel obtained by spin coating and lamination. A 107% tuning range with high inductance from 5.4 to 2.6 nH is achieved. With no actuation, the peak quality factor is 12, and the self-resonance frequency is 4 GHz.