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Communication Dans Un Congrès Année : 2017

Investigating the formation of nanoparticles in HMDSO-based dusty plasma with pulsed injection of the precursor with application to deposition of nanocomposite layers

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hal-03954587 , version 1 (24-01-2023)

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  • HAL Id : hal-03954587 , version 1

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V. Garofano, R. Berard, L. Stafford, Bernard Despax, Freddy Gaboriau, et al.. Investigating the formation of nanoparticles in HMDSO-based dusty plasma with pulsed injection of the precursor with application to deposition of nanocomposite layers. 8th Symposium on Functional Coatings and Surface Engineering (FCSE-2017), June 4-7, 2017, Montreal (CANADA), 2017, Montreal, Canada. ⟨hal-03954587⟩
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