Investigation of nanoparticle growth in ECR based plasma using Langmuir probe - Archive ouverte HAL
Communication Dans Un Congrès Année : 2010
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hal-03954467 , version 1 (24-01-2023)

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Pavel Yuryev, Aleksander Drenik, M. Calafat-Ramirez, Freddy Gaboriau, Richard Clergereaux. Investigation of nanoparticle growth in ECR based plasma using Langmuir probe. 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas Paris, France, 2010, Paris, France. ⟨hal-03954467⟩
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